Equipment for Plasma, Thin Films, and Surface Engineering

Wide range of gas analyzers, mass and energy analyzers, ion guns and Langmuir Probes for precise measurement of ions, neutrals, radicals and electrical parameters in plasma processing and surface science applications.

Advanced Gas Analyzers, Mass & Energy Analyzers, and Ion Guns

Hiden Inc. is a respected developer, manufacturer, supplier, and champion of scientific equipment for thin films, plasma, and surface engineering. Our high-performance mass spectrometers are used in a wide variety of scientific applications where both molecular and elemental accuracy are critical to the analysis.

Our products, workstations, and probes remain the core of many institutions— we hope they will serve yours equally.

Interested in purchasing an instrument?

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Hiden Inc.’s Surface Engineering Instruments for Sale

HPR-30

Pumped gas analyzer for vacuum analysis

In-Situ differentially pumped gas analyzer for wide range vacuum process gas composition, contamination monitoring and leak detection.

Applications

  • Plasma Studies
  • Freeze Drying
  • CVD/MOCVD/ALD
  • Vacuum Processing
  • Residual Gas Analysis

EQP

Mass analyzer for plasma

Combined mass and energy analyzers for high performance mass and energy analysis of neutrals, radicals ( electro-positive and negative ), positive and negative ions in plasma processes. The system combines a high sensitivity electrostatic sector field energy analyzer with our precision triple filter quadrupole mass spectrometer

Applications

  • Analysis of Ions and Radicals
  • Etching / Deposition Studies
  • Ion Implantation
  • Laser Ablation
  • Plasma Up-Scaling
  • RGA
  • HIPIMS

HPR-60 MBMS

Machine for high pressure molecular beam sampling
High pressure molecular beam mass spectrometer sampling system for analysis of atmospheric plasma and reactive gas phase intermediates ( neutrals, radicals, positive and negative ions ).

Applications

  • Plasma Characterization
  • Gas Reactions Kinetics
  • Environmental Studies
  • Catalysis Characterization
  • Gas Separation Studies

PSM

Scientific equipment for plasma chemistry
Mass and energy analyzer for plasma diagnostics – identifying the key components and reaction kinetics in plasma chemistry.

Applications

  • Reactive Ion Etching
  • Plasma Deposition Studies
  • Ion Implantation
  • Laser Ablation
  • Plasma Electrode Coupling
  • RGA
  • HIPIMS

ESPion

chemistry probe for low pressure plasma

An advanced Langmuir probe featuring static and spatially resolved measurements of the primary electrical parameters of low and high pressure plasma.

Applications

  • Plasma Characterization
  • Plasma Potential
  • Floating Potential
  • Electron Temperature
  • Ion Density
  • Electron Energy Distribution
  • Ion Flux

XBS

Multiple source deposition monitoring machine
Multiple source deposition monitoring in MBE applications. High contamination resistant purpose designed quadrupole for deposition rate monitoring, source quality analysis and high performance vacuum diagnostics.

Applications

  • MBE Monitoring & Control
  • Molecular Beam Studies
  • Multiple Beam Source Analysis
  • High Performance Residual Gas Analysis

IMP – EPD

Ion milling probe end point detector for identification of material interfaces in multi-layer device fabrication – applications include magnetic thin films, high temperature superconductors and III-V semiconductors.

Applications

  • End Point Analysis
  • Target Impurity Determination
  • Quality Control / SPC
  • Residual Gas Analysis
  • Leak Detection

TPD Workstation

Research workstations for sale for surface analysis
Integrated UHV temperature programmed desorption workstation. Complete with fast sample load lock, heated sample stage, triple filter quadrupole mass spectrometer and cooled shroud for optimum sensitivity and minimum backgrounds.

Applications

  • Thermal Analysis MS
  • Catalysis
  • Surface Science
  • Surface Analysis
  • Nanotechnology
  • Fuel Cells

SIMS/SNMS Workstation

Surface analyzer for thin films and plasma
High performance static and dynamic SIMS for detailed surface composition analysis and depth profiling – featuring SNMS for quantification in thin film composition measurements.

Applications

  • Catalysis
  • Surface Analysis
  • Thin Film & Surface Engineering
  • Nanotechnology
  • Fuel Cells
  • Semiconductors

Compact SIMS

Ion gun for thin film measurements
UHV surface analysis system for thin film depth profiling – featuring 10 sample rotary carousel, oxygen primary ion gun and positive ion measurements of layer structures, surface contamination and impurities.

Applications

  • Solar Cells
  • Glass Coating
  • Metallic Thin Films

Auto SIMS

complete scientific workstation for repetitive surface analysis
Self contained automated SIMS tool for routine and repetitive surface analysis – ideally suited to the measurement of thin films, contamination and doping from the top monolayer to micron depth in both conductive and insulating material.

Applications

  • Thin Films
  • Surface Modification
  • Coating
  • Map Large Areas

EQS SIMS Analyzer

Energy analyzer for research and development of surfaces
Bolt-on SIMS probe for the analysis of positive and negative secondary ions from solid samples. Includes high transmission triple filter quadrupole, 45 degree electrostatic sector field energy analyzer and on-axis ion collection for ease of installation on surface analysis instrumentation.

Applications

  • Surface Analysis
  • Thin Film & Surface Engineering
  • Catalysis
  • Surface Science
  • FIB-SIMS

MAXIM

Surface mapping instrument for chemical analysis
Bolt-on SIMS/SNMS analyzer for surface composition and elemental SIMS mapping – featuring 30 degree acceptance angle, mounting axis parallel to the plane of the sample and tolerance to sample charging for ease of inclusion with other optics and analysis of insulators.

Applications

  • Catalysis
  • Surface Analysis
  • Thin Film & Surface Engineering
  • Surface Science
  • Nanotechnology

IG5C

cesium ion gun for surface analysis and plasma research
A 5keV Caesium ion gun for SIMS/SNMS analysis and elemental mapping of electronegative species. Suitable for all SIMS applications, dynamic, static and imaging.

Applications

  • Catalysis
  • Surface Analysis
  • Thin Film & Surface Engineering
  • Surface Science
  • Nanotechnology

IG20

Oxygen surface analysis machine for sale
A 5keV Argon or Oxygen primary ion source for SIMS/SNMS analysis and elemental mapping of electropositive species.

Applications

  • Surface Analysis
  • Thin Films and Surface Engineering
  • Surface Science
  • Nanotechnology
  • Auger Electron Spectroscopy
  • Ion Beam Sputtering
  • Rastering Depth Profiling

Interested in Purchasing Equipment for Surface Engineering?

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Sales

Tel: 734-542-6666
Toll free: 1-888 96HIDEN (44336) option 1

Support

Tel: 734-542-6666
Toll free: 1-888 96HIDEN (44336) option 2