For Plasma, Thin Films and Surface Engineering

Wide range of gas analyzers, mass and energy analyzers, ion guns and Langmuir Probes for precise measurement of ions, neutrals, radicals and electrical parameters in plasma processing and surface science applications.

HPR-30

In-Situ differentially pumped gas analyzer for vacuum process gas composition, contamination monitoring and leak detection.

Applications

  • Plasma Studies
  • Freeze Drying
  • CVD/MOCVD/ALD
  • Vacuum Processing
  • Residual Gas Analysis

EQP

Combined mass and energy analyzers for detailed studies in plasma process of neutrals, radicals ( electro-positive and negative ) positive and negative ions.

Applications

  • Analysis of Ions and Radicals
  • Etching / Deposition Studies
  • Ion Implantation
  • Laser Ablation
  • Plasma Up-Scaling
  • RGA
  • HIPIMS

HPR-60 MBMS

High pressure molecular beam mass spectrometer sampling system for analysis of atmospheric plasma and reactive gas phase intermediates ( neutrals, radicals, positive and negative ions ).

Applications

  • Plasma Characterization
  • Gas Reactions Kinetics
  • Environmental Studies
  • Catalysis Characterization
  • Gas Separation Studies

PSM

Mass and energy analyzer for plasma diagnostics – identifying the key components and reaction kinetics in plasma chemistry.

Applications

  • Reactive Ion Etching
  • Plasma Deposition Studies
  • Ion Implantation
  • Laser Ablation
  • Plasma Electrode Coupling
  • RGA
  • HIPIMS

ESPion

An advanced Langmuir probe featuring static and spatially resolved measurements of the primary electrical parameters of low pressure plasma.

Applications

  • Plasma Characterization
  • Plasma Potential
  • Floating Potential
  • Electron Temperature
  • Ion Density
  • Electron Energy Distribution
  • Ion Flux

XBS

Multiple source deposition monitoring in MBE applications. High contamination resistant purpose designed quadrupole for deposition rate monitoring, source quality analysis and high performance vacuum diagnostics.

Applications

  • MBE Monitoring & Control
  • Molecular Beam Studies
  • Multiple Beam Source Analysis
  • High Performance Residual Gas Analysis

IMP – EPD

Ion milling probe end point detector for identification of material interfaces in multi-layer device fabrication – applications include magnetic thin films, high temperature superconductors and III-V semiconductors.

Applications

  • End Point Analysis
  • Target Impurity Determination
  • Quality Control / SPC
  • Residual Gas Analysis
  • Leak Detection

TPD Workstation

Integrated UHV temperature programmed desorption workstation. Complete with fast sample load lock, heated sample stage, triple filter quadrupole mass spectrometer and cooled shroud for optimum sensitivity and minimum backgrounds.

Applications

  • Thermal Analysis MS
  • Catalysis
  • Surface Science
  • Surface Analysis
  • Nanotechnology
  • Fuel Cells

SIMS/SNMS Workstation

High performance static and dynamic SIMS for detailed surface composition analysis and depth profiling – featuring SNMS for quantification in thin film composition measurements.

Applications

  • Catalysis
  • Surface Analysis
  • Thin Film & Surface Engineering
  • Nanotechnology
  • Fuel Cells
  • Semiconductors

Compact SIMS

UHV surface analysis system for thin film depth profiling – featuring 10 sample rotary carousel, oxygen primary ion gun and positive ion measurements of layer structures, surface contamination and impurities.

Applications

  • Solar Cells
  • Glass Coating
  • Metallic Thin Films

Auto SIMS

Self contained automated SIMS tool for routine and repetitive surface analysis – ideally suited to the measurement of thin films, contamination and doping from the top monolayer to micron depth in both conductive and insulating material.

Applications

  • Thin Films
  • Surface Modification
  • Coating
  • Map Large Areas

EQS

Bolt-on SIMS probe for the analysis of positive and negative secondary ions from solid samples. Includes high transmission triple filter quadrupole, 45 degree electrostatic sector field energy analyzer and on-axis ion collection for ease of installation on surface analysis instrumentation.

Applications

  • Surface Analysis
  • Thin Film & Surface Engineering
  • Catalysis
  • Surface Science
  • FIB-SIMS

MAXIM

Bolt-on SIMS/SNMS analyzer for surface composition and elemental SIMS mapping – featuring 30 degree acceptance angle, mounting axis parallel to the plane of the sample and tolerance to sample charging for ease of inclusion with other optics and analysis of insulators.

Applications

  • Catalysis
  • Surface Analysis
  • Thin Film & Surface Engineering
  • Surface Science
  • Nanotechnology

IG5C

A 5keV Caesium ion gun for SIMS/SNMS analysis and elemental mapping of electronegative species. Suitable for all SIMS applications, dynamic, static and imaging.

Applications

  • Catalysis
  • Surface Analysis
  • Thin Film & Surface Engineering
  • Surface Science
  • Nanotechnology

IG20

A 5keV Argon or Oxygen primary ion source for SIMS/SNMS analysis and elemental mapping of electropositive species.

Applications

  • Surface Analysis
  • Thin Films and Surface Engineering
  • Surface Science
  • Nanotechnology
  • Auger Electron Spectroscopy
  • Ion Beam Sputtering
  • Rastering Depth Profiling

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Sales

Tel: 734-542-6666
Toll free: 1-888 96HIDEN (44336) option 1

Support

Tel: 734-542-6666
Toll free: 1-888 96HIDEN (44336) option 2