For Residual Gas Analysis

The most extensive range of precision Residual Gas Analyzers available. Backed by a 3 year warranty and life time support, Hiden Analytical’s RGA’s are recognized for their sensitivity, speed and response accuracy.

RGA Series – Single and Triple Filter Quadrupoles

Mass Range: 50, 100, 200, 300 and 510 amu

Detection Range: Analog and Pulse Ion Counting detectors for minimum detectable concentrations of 2 x 10 -13, 2 x 10-14 and 2 x 10-15 mbar.

Ion Source Options:

  • Standard RGA – General Vacuum Application
  • UHV Low Profile – for UHV TPD Studies
  • Closed – for differentially pumped direct gas input
  • Cross-beam – for MBE, Laser Ionization, Condensable Gas Beams
  • Ion-optics – for Electron, Photon and Laser Stimulated Studies
  • Pt/Au Ionizers – for Reactive Gases and minimal Outgassing

Applications

  • Residual gas analysis
  • Leak Detection
  • Desorption
  • Outgassing studies
  • Bakeout cycles
  • Pump performance
  • Process gas contaminants

HMT

Combined UHV/High Pressure Quadrupole for vacuum diagnostics and non-differentially pumped process monitoring.

Applications

  • PVD
  • Thin Film
  • Sputtering
  • RGA
  • Vacuum Processing

HALO 201 MBE

Dedicated residual gas analyzer for MBE ( Molecular Beam Epitaxy ) vacuum diagnostic applications.

Applications

  • III-V / II-VI Materials
  • Semiconductors
  • Fuel Cells

XBS

Multiple source deposition monitoring in MBE applications high contamination resistant purpose designed quadrupole  for deposition rate monitoring, effusive source quality analysis and high performance vacuum diagnostics.

Applications

  • MBE Monitoring + Control
  • Molecular Beam Studies
  • Multiple Beam Source Analysis
  • High Performance
  • Residual Gas Analysis

qRGA

Dedicated quadrupole mass spectrometer for tokamak/torus fusion research – features TIMS for electron energy control and preferential ionization critical for separating, for example He and D2.

Applications

  • Tokamak / Torus fusion research

DLS-20

Ultra high resolution quadrupole mass spectrometer featuring 20mm pole diameter – specifically designed for the analysis of hydrogen and Helium isotopes and light gases.

Applications

  • Cluster Studies
  • Isotope Studies
  • Synchrotron Studies
  • Nanotechnology
  • High Performance Residual Gas Analysis

EPIC Series

High sensitivity quadrupole mass spectrometer  with pulse ion counting detector for ions, neutrals and radicals in UHV/XHV.

Applications

  • Surface Science
  • Thin Film & Surface Engineering
  • Catalysis
  • Molecular Beam Studies

IDP

Precision Ion Desorption Probe – measurement of ions, neutrals and radical in electron and photon stimulated desorption applications.

Applications

  • Surface Science
  • Catalysis

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