For Plasma, Thin Films and Surface Engineering
Wide range of gas analyzers, mass and energy analyzers, ion guns and Langmuir Probes for precise measurement of ions, neutrals, radicals and electrical parameters in plasma processing and surface science applications.
HPR-30
In-Situ differentially pumped gas analyzer for vacuum process gas composition, contamination monitoring and leak detection.
Applications
- Plasma Studies
- Freeze Drying
- CVD/MOCVD/ALD
- Vacuum Processing
- Residual Gas Analysis
EQP
Combined mass and energy analyzers for detailed studies in plasma process of neutrals, radicals ( electro-positive and negative ) positive and negative ions.
Applications
- Analysis of Ions and Radicals
- Etching / Deposition Studies
- Ion Implantation
- Laser Ablation
- Plasma Up-Scaling
- RGA
- HIPIMS
HPR-60 MBMS
High pressure molecular beam mass spectrometer sampling system for analysis of atmospheric plasma and reactive gas phase intermediates ( neutrals, radicals, positive and negative ions ).
Applications
- Plasma Characterization
- Gas Reactions Kinetics
- Environmental Studies
- Catalysis Characterization
- Gas Separation Studies
PSM
Mass and energy analyzer for plasma diagnostics – identifying the key components and reaction kinetics in plasma chemistry.
Applications
- Reactive Ion Etching
- Plasma Deposition Studies
- Ion Implantation
- Laser Ablation
- Plasma Electrode Coupling
- RGA
- HIPIMS
ESPion
An advanced Langmuir probe featuring static and spatially resolved measurements of the primary electrical parameters of low pressure plasma.
Applications
- Plasma Characterization
- Plasma Potential
- Floating Potential
- Electron Temperature
- Ion Density
- Electron Energy Distribution
- Ion Flux
XBS
Multiple source deposition monitoring in MBE applications. High contamination resistant purpose designed quadrupole for deposition rate monitoring, source quality analysis and high performance vacuum diagnostics.
Applications
- MBE Monitoring & Control
- Molecular Beam Studies
- Multiple Beam Source Analysis
- High Performance Residual Gas Analysis
IMP – EPD
Ion milling probe end point detector for identification of material interfaces in multi-layer device fabrication – applications include magnetic thin films, high temperature superconductors and III-V semiconductors.
Applications
- End Point Analysis
- Target Impurity Determination
- Quality Control / SPC
- Residual Gas Analysis
- Leak Detection
TPD Workstation
Integrated UHV temperature programmed desorption workstation. Complete with fast sample load lock, heated sample stage, triple filter quadrupole mass spectrometer and cooled shroud for optimum sensitivity and minimum backgrounds.
Applications
- Thermal Analysis MS
- Catalysis
- Surface Science
- Surface Analysis
- Nanotechnology
- Fuel Cells
SIMS/SNMS Workstation
High performance static and dynamic SIMS for detailed surface composition analysis and depth profiling – featuring SNMS for quantification in thin film composition measurements.
Applications
- Catalysis
- Surface Analysis
- Thin Film & Surface Engineering
- Nanotechnology
- Fuel Cells
- Semiconductors
Compact SIMS
UHV surface analysis system for thin film depth profiling – featuring 10 sample rotary carousel, oxygen primary ion gun and positive ion measurements of layer structures, surface contamination and impurities.
Applications
- Solar Cells
- Glass Coating
- Metallic Thin Films
Auto SIMS
Self contained automated SIMS tool for routine and repetitive surface analysis – ideally suited to the measurement of thin films, contamination and doping from the top monolayer to micron depth in both conductive and insulating material.
Applications
- Thin Films
- Surface Modification
- Coating
- Map Large Areas
EQS SIMS Analyzer
Bolt-on SIMS probe for the analysis of positive and negative secondary ions from solid samples. Includes high transmission triple filter quadrupole, 45 degree electrostatic sector field energy analyzer and on-axis ion collection for ease of installation on surface analysis instrumentation.
Applications
- Surface Analysis
- Thin Film & Surface Engineering
- Catalysis
- Surface Science
- FIB-SIMS
MAXIM
Bolt-on SIMS/SNMS analyzer for surface composition and elemental SIMS mapping – featuring 30 degree acceptance angle, mounting axis parallel to the plane of the sample and tolerance to sample charging for ease of inclusion with other optics and analysis of insulators.
Applications
- Catalysis
- Surface Analysis
- Thin Film & Surface Engineering
- Surface Science
- Nanotechnology
IG5C
A 5keV Caesium ion gun for SIMS/SNMS analysis and elemental mapping of electronegative species. Suitable for all SIMS applications, dynamic, static and imaging.
Applications
- Catalysis
- Surface Analysis
- Thin Film & Surface Engineering
- Surface Science
- Nanotechnology
IG20
A 5keV Argon or Oxygen primary ion source for SIMS/SNMS analysis and elemental mapping of electropositive species.
Applications
- Surface Analysis
- Thin Films and Surface Engineering
- Surface Science
- Nanotechnology
- Auger Electron Spectroscopy
- Ion Beam Sputtering
- Rastering Depth Profiling