Equipment for Residual Gas Analysis
The most extensive range of precision Residual Gas Analyzers available. Backed by a 3 year warranty and life time support, Hiden Analytical’s RGA’s are recognized for their sensitivity, speed and response accuracy.
RGA Series – Single and Triple Filter Quadrupoles
Mass Range: 50, 100, 200, 300 and 510 amu
Detection Range: Analog and Pulse Ion Counting detectors for minimum detectable concentrations of 2 x 10 -13, 2 x 10-14 and 2 x 10-15 mbar.
Ion Source Options:
- Standard RGA – General Vacuum Application
- UHV Low Profile – for UHV TPD Studies
- Closed – for differentially pumped direct gas input
- Cross-beam – for MBE, Laser Ionization, Condensable Gas Beams
- Ion-optics – for Electron, Photon and Laser Stimulated Studies
- Pt/Au Ionizers – for Reactive Gases and minimal Outgassing
Applications
- Residual gas analysis
- Leak Detection
- Desorption
- Outgassing studies
- Bakeout cycles
- Pump performance
- Process gas contaminants
HMT
Combined UHV/High Pressure Quadrupole for vacuum diagnostics and non-differentially pumped process monitoring.
Applications
- PVD
- Thin Film
- Sputtering
- RGA
- Vacuum Processing
HALO 201 MBE
Dedicated residual gas analyzer for MBE ( Molecular Beam Epitaxy ) vacuum diagnostic applications.
Applications
- III-V / II-VI Materials
- Semiconductors
- Fuel Cells
XBS
Multiple source deposition monitoring in MBE applications high contamination resistant purpose designed quadrupole  for deposition rate monitoring, effusive source quality analysis and high performance vacuum diagnostics.
Applications
- MBE Monitoring + Control
- Molecular Beam Studies
- Multiple Beam Source Analysis
- High Performance
- Residual Gas Analysis
HAL 101X
A system for tokamak/torus fusion research with remote analyzer mounting up to 80 m. Includes the qRGA system TIMS mode for measurement the concentration of fusion fuel gas purity including hydrogen isotopes, deuterium in helium for example.
Applications
- Fusion Research
- Residual Gas Analysis
- Leak Detection
- Desorption
- Outgassing Studies
- Bakeout Cycles
- Pump Performance
- Process Gas Contaminants
EPIC Series
High sensitivity quadrupole mass spectrometer  with pulse ion counting detector for ions, neutrals and radicals in UHV/XHV.
Applications
- Surface Science
- Thin Film & Surface Engineering
- Catalysis
- Molecular Beam Studies
IDP
Precision Ion Desorption Probe – measurement of ions, neutrals and radical in electron and photon stimulated desorption applications.
Applications
- Surface Science
- Catalysis
DLS-1
The DLS-1 (quadrupole residual gas analyzer) is designed for analysis of fusion system fuel delivery, and operates in TIMS mode. TIMS mode provides for control of the energy of the electrons emitted within the ionisation source, resulting in each species, D2 and 4He for example having a unique fingerprint that can be determined by DLS-1. This mode of operation is known as Threshold Ionisation Mass Spectrometry (TIMS).
Applications
- Fusion Research
- Tokamak/Torus Fusion Research
DLS-10
Ultra High-Resolution Quadruple Mass Spectrometer. Specifically designed for the analysis of Hydrogen and Helium Isotopes and light gases
Applications
- Fusion Research
- Isotope Studies
- Synchrotron Studies
- Nanotechnology
- Residual Gas Analysis
DLS-20
Unique Dual-Zone Switching Ultra High-Resolution Quadrupole Mass Spectrometer. Specifically designed for the analysis of Hydrogen and Helium Isotopes and light gases.
Applications
- Fusion Research
- Isotope Studies
- Synchrotron Studies
- Nanotechnology
- Residual Gas Analysis
Ion Source Options
A range of electron impact ion sources that can be supplied with any of our residual gas analyzers. Configures residual gas analyzers for specific applications, molecular beam analysis for example.
Applications
- Thermal Analysis TA/MS
- Catalysis Studies
- Reaction Kinetics
- Fuel Cells
- CVD/MOCVD/ALCVD
- Environmental Monitoring
HAL 201 RC
A Residual Gas Analyzer configured for demanding UHV applications. Measures the concentration of gases and vapors in real time.
Applications
- Residual Gas Analysis
- Leak Detection
- Desorption
- Outgassing Studies
- Bakeout Cycles
- Pump Performance
- Process Gas Contaminants
3F-PIC / 1000 Series PIC
A system for fast event UHV studies. Measures the partial pressures of species at UHV with pulse ion counting detection.
Applications
- UHV TPD
- Surface Science
- Single Crystal Studies
- Molecular Beam Studies
- Flash Desorption Analysis
- High Performance RGA
- Desorption Studies
- Outgassing Studies
- Bakeout Cycles
- Process Contaminants
3F Series / 1000 Series RGA
A system for high precision scientific and process applications. Measures the partial pressures of residual gases with ultra-high resolution and extended mass range options to 1000 AMU.
Applications
- Thermal Analysis MS
- Catalysis
- TPD / TPR / TPO
- Pulse Chemisorption
- Catalyst Screening
- Dispersion Measurements
- Adsorption Isotherms
- Reaction Studies