Residual Gas Analysis Mass Spectrometry
The most extensive range of precision Residual Gas Analyzers available. Backed by a 3 year warranty and life time support, Hiden Analytical’s RGAs are recognized for their sensitivity, speed and response accuracy.
Advanced Equipment for Residual Gas Analysis
Hiden Inc. is a respected developer, manufacturer, supplier, and champion of scientific equipment for RGA. Our high-performance mass spectrometers are used in a wide variety of scientific applications where precision, stability and accuracy at both the atomic and molecular level are paramount.
Our products, workstations, and probes remain the core of many institutions— we hope they will serve yours equally.
![Probe instrument for laboratory mass spectrometry](https://hideninc.com/wp-content/uploads/2018/10/DLS-20.png)
Hiden Inc.’s Mass Spectrometers For Sale
RGA Series – Single and Triple Filter Quadrupole Mass Spectrometers
![Residual gas analysis quadrupoles scientific probe instrument](https://hideninc.com/wp-content/uploads/2016/11/RGA-Series.png)
Mass Range: 50, 100, 200, 300 and 510 amu
Detection Range: Analog and Pulse Ion Counting detectors for minimum detectable concentrations of 2 x 10 -13, 2 x 10-14 and 2 x 10-15 mbar.
Ion Source Options:
- Standard RGA – General Vacuum Applications
- UHV Low Profile – for UHV TPD Studies
- Closed – for differentially pumped direct gas input
- Cross-beam – for MBE, Laser Ionization, Condensable Gas Beams
- Ion-optics – for Electron, Photon and Laser Stimulated Studies
- Pt/Au Ionizers – for Reactive Gases and minimal Outgassing
Applications
- Residual gas analysis
- Leak Detection
- Desorption
- Outgassing studies
- Bakeout cycles
- Pump performance
- Process gas contaminants
HMT
![combination probe instrument for vacuum diagnostics](https://hideninc.com/wp-content/uploads/2016/11/HMT_289x200px.jpg)
Applications
- PVD
- Thin Film
- Sputtering
- RGA
- Vacuum Processing
HALO 201 MBE
![Scientific equipment for molecular bean epitaxy](https://hideninc.com/wp-content/uploads/2016/11/HALO201MBE-289x200px.jpg)
Applications
- III-V / II-VI Materials
- Semiconductors
- Fuel Cells
XBS
![instrument for multiple source deposition monitoring for MBE](https://hideninc.com/wp-content/uploads/2016/11/XBS-300x200px-300x200.jpg)
Multiple source deposition monitoring in MBE applications high contamination resistant purpose designed quadrupole for deposition rate monitoring, effusive source quality analysis and high performance vacuum diagnostics.
Applications
- MBE Monitoring + Control
- Molecular Beam Studies
- Multiple Beam Source Analysis
- High Performance
- Residual Gas Analysis
HAL 101X
![Fusion research machine analyzer](https://hideninc.com/wp-content/uploads/2016/11/qrga.png)
Applications
- Fusion Research
- Residual Gas Analysis
- Leak Detection
- Desorption
- Outgassing Studies
- Bakeout Cycles
- Pump Performance
- Process Gas Contaminants
EPIC Series
![Probe for high sensitivity lab pulse ion counting](https://hideninc.com/wp-content/uploads/2016/11/EPIC.png)
Applications
- Surface Science
- Thin Film & Surface Engineering
- Catalysis
- Molecular Beam Studies
IDP
![Scientific Equipment for measurements of ions, neutrals, and photos](https://hideninc.com/wp-content/uploads/2016/11/IDP-300x169.png)
Applications
- Surface Science
- Catalysis
DLS-1
![scientific equipment for residual gas analysis in fuel delivery](https://hideninc.com/wp-content/uploads/2018/10/qrga-small.png)
The DLS-1 (quadrupole residual gas analyzer) is designed for analysis of fusion system fuel delivery, and operates in TIMS mode. TIMS mode provides for control of the energy of the electrons emitted within the ionisation source, resulting in each species, D2 and 4He for example having a unique fingerprint that can be measured by the DLS-1. This mode of operation is known as Threshold Ionisation Mass Spectrometry (TIMS).
Applications
- Fusion Research
- Tokamak/Torus Fusion Research
DLS-10
![Probe for ultra-high resolution mass analysis](https://hideninc.com/wp-content/uploads/2018/10/DLS-10.jpg)
Applications
- Fusion Research
- Isotope Studies
- Synchrotron Studies
- Nanotechnology
- Residual Gas Analysis
DLS-20
![Probe instrument for laboratory mass spectrometry](https://hideninc.com/wp-content/uploads/2018/10/DLS-20.png)
Applications
- Fusion Research
- Isotope Studies
- Synchrotron Studies
- Nanotechnology
- Residual Gas Analysis
Ion Source Options
![instrument for molecular beam analysis and gas analysis](https://hideninc.com/wp-content/uploads/2018/10/rga-source-small.png)
Applications
- Thermal Analysis TA/MS
- Catalysis Studies
- Reaction Kinetics
- Fuel Cells
- CVD/MOCVD/ALCVD
- Environmental Monitoring
HAL 201 RC
![RGA probe for UHV applications](https://hideninc.com/wp-content/uploads/2018/10/rga-gold-source-small.png)
Applications
- Residual Gas Analysis
- Leak Detection
- Desorption
- Outgassing Studies
- Bakeout Cycles
- Pump Performance
- Process Gas Contaminants
3F-PIC / 1000 Series PIC
![Scientific instrument forUHV studies](https://hideninc.com/wp-content/uploads/2018/10/uhv-tpd-small.png)
Applications
- UHV TPD
- Surface Science
- Single Crystal Studies
- Molecular Beam Studies
- Flash Desorption Analysis
- High Performance RGA
- Desorption Studies
- Outgassing Studies
- Bakeout Cycles
- Process Contaminants
3F Series / 1000 Series RGA
![1000 AMU probe for high precision scientific pressure analysis](https://hideninc.com/wp-content/uploads/2018/10/3f-series-small.png)
A system for high precision scientific research and process applications. Measures the partial pressures of residual gases with ultra-high resolution and extended mass range options to 1000 AMU.
Applications
- Thermal Analysis MS
- Catalysis
- TPD / TPR / TPO
- Pulse Chemisorption
- Catalyst Screening
- Dispersion Measurements
- Adsorption Isotherms
- Reaction Studies