Products.
Every Hiden instrument and software package, grouped by product line. Every system is configured to the measurement rather than sold off a shelf.
HPR-20 gas analysis systems
HPR-20 R&D
A benchtop triple filter mass spectrometer for monitoring evolved gases and vapors, with improved resolution and abundance sensitivity.
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HPR-20 TMS
A transient mass spectrometer configured for fast event analysis of gases and vapors at pressures near atmosphere, ideal for fast gas switching experiments.
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HPR-20 EGA
A gas analysis system for continuous analysis of evolved gases and vapors from thermogravimetric analyzers, with interfaces for most TGA instruments.
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HPR-20 OEMS
A system for continuous analysis of evolved gases and vapors in electrochemistry as a function of the applied potential on the real-time scale.
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HPR-20 DLS
A gas analysis system for ultra-high resolution and sensitivity analysis of hydrogen isotopes and light gases, built around the DLS-20 triple filter quadrupole.
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HPR-20 EPIC
A gas analysis system with a triple filter mass spectrometer and a pulse ion counting detector for positive and negative ion detection.
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HPR-20 S1000
A gas analysis system with a triple filter quadrupole mass spectrometer of 1000 amu mass range and detection capability of less than 5 ppb.
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QGA and QIC
QGA 2.0
A compact quantitative gas analyzer, optimized for continuous analysis of gases and vapors in near atmospheric pressures.
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QIC BioStream
A special multi-stream system configuration for fermentation off-gas analysis, with software calculating oxygen uptake rate, carbon dioxide expiration rate and respiratory quotient.
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QIC Multistream
Gas analysis systems for multi-stream analysis, with a laboratory scale valve for up to 16 sample lines or a process valve for up to 80 sample lines.
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Carbon Monoxide (CO) Analyzer
Quantitative CO Analysis for Complex Gas Mixtures
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Compact Gas Analyzers
For less demanding applications Hiden Analytical offer compact gas analyzers
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Specialist gas and dissolved species systems
HPR-40 DEMS
A modular benchtop or mobile cart mounted system for analysis of dissolved species in electrochemistry, with differential electrochemical mass spectrometry cell inlets.
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HPR-40 MIMS
A compact benchtop membrane inlet mass spectrometer system for quantitative analysis and monitoring of dissolved and evolved gases.
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HPR-30 Series
Vacuum process gas analyzers designed for fast response, high sensitivity analysis of gas and vapor species in vacuum processes.
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pQA Portable Quadrupole Analyzer
A compact, transportable, ruggedized case mounted gas analyzer configured for environmental field studies, using membrane inlet mass spectrometry.
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Residual gas analyzers
HALO Residual Gas Analyzer
The Hiden HALO Residual Gas Analyzer (RGA) is designed for routine vacuum monitoring, chamber fingerprinting, leak detection, and trend analysis.
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HAL 201 RC
A Residual Gas Analyzer configured for demanding UHV applications
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RGA Series
A broad range of quadrupole residual gas analyzers for contamination monitoring, leak detection and analysis of the species within the vacuum chamber.
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3F Series Triple-Filter Quadrupole Mass Spectrometers
The Hiden 3F and 1000 Series are high-precision triple-filter quadrupole mass spectrometers for analytical residual gas and process applications.
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HALO 201 MBE
A residual gas analyzer for molecular beam epitaxy, built for prolonged use in MBE environments with molybdenum wiring and a contamination resistant ion source shroud.
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LAS Leak Analysis System
An automated leak analysis system for quality control or R&D, designed to test the leak tightness of small to medium size battery assemblies.
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HMT
A dual mode RGA system for vacuum diagnostics and process monitoring
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IDP Ion Desorption Probe
The Hiden IDP is a quadrupole ion desorption probe for direct analysis of low-energy ions, neutrals and radicals generated in UHV surface science experiments.
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Ion Source Options for Residual Gas Analyzers
Hiden offers interchangeable electron impact and application-specific ion sources for configuring residual gas analyzers around pressure, sample geometry and gas chemistry.
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EPIC Research-Grade UHV and XHV Mass Spectrometer
The Hiden EPIC and EPIC 1000 Series extend high-performance residual gas analysis to neutrals, radicals and positive or negative ions.
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Instrument for Fusion Research
DLS-1
A mass spectrometer for real-time quantitative analysis of complex gas and vapor mixtures in fusion applications, using TIMS recipes for hydrogen and helium isotopes.
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DLS-2/DLS-2X
The radiation-hardened DLS-2 features remote electronics up to 140 m away, ITER-tested radiation resistance, high-resolution mass analysis, and optional magnetic shielding and specialized cable sets for demanding radiation environments.
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DLS-20
A dual-zone switching ultra-high resolution quadrupole mass spectrometer for the analysis of hydrogen and helium isotopes and light gases.
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HAL 101X
A residual gas analyzer for synchrotron, accelerator and tokamak or torus applications in harsh radiation environments, with no active electronics near the gauge.
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Surface analysis and SIMS
EQS
A system for the analysis of secondary positive and negative ions from solid samples
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SIMS Workstation
High performance static and dynamic SIMS for surface composition analysis and depth profiling, with SNMS for quantification in thin film measurements.
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AutoSIMS
A self-contained automated SIMS tool for routine and repetitive surface analysis of thin films, contamination and doping, in conductive and insulating material.
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Dual Polarity SIMS Workstation
The Dual Polarity SIMS Workstation simultaneously detects positive and negative ions using two opposing EQS spectrometers. Designed for ultra-thin layer analysis and battery research, it is ideal for studying materials such as the solid electrolyte interphase (SEI) layer.
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Compact SIMS
A SIMS tool designed for fast and reliable characterization of layer structures, surface contamination and impurities, with sensitive positive ion detection.
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FIB-SIMS
FIB-SIMS integrates Hiden’s EQS-FIB 1000 SIMS probe with existing FIB systems, delivering 50 nm lateral and 5 nm depth resolution with standard and custom platform interfaces.
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ToF-qSIMS Workstation
A time of flight quadrupole SIMS system offering static ToF-SIMS capabilities and high dynamic range depth profiling from the quadrupole SIMS.
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Custom SIMS Solutions
The low extraction field characteristics and modular nature of Hiden quadrupole SIMS spectrometers, coupled with an experienced custom design team, allow specialist surface analysis tools to be realized; whether adding SIMS to an existing system or designing a complete instrument from scratch.
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IG20
A 5keV Argon or Oxygen ion source for UHV surface analysis applications
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IG5C
A 5keV Cesium ion gun for UHV surface analysis applications
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MAXIM
A system for static and dynamic SIMS and SNMS applications
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Modular SIMS
Add high performance SIMS capability to your surface analysis chamber
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XPS for SIMS
A multi-technique UHV surface science system option providing for XPS, UPS, AES, SAM, ISS and LEIS installed on the Hiden SIMS Workstation
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Plasma and thin film process monitoring
EQP Series
A quadrupole mass spectrometer series for direct analysis of plasma ion mass and energy, measuring ions, neutrals and radicals from plasma.
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ESPion
An advanced Langmuir probe for plasma diagnostics, measuring electrical properties of plasmas such as plasma potential, floating potential and electron temperature.
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IMP-EPD
A differentially pumped, ruggedized secondary ion mass spectrometer for end point detection in the ion beam etch process.
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XBS
A quadrupole mass spectrometer for monitoring multiple beam sources simultaneously, serving as a deposition rate monitor for molecular beam analysis and deposition control.
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HPR-60 MBMS
A compact skimmer inlet molecular beam mass spectrometer for the analysis of reactive gas phase intermediates.
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PSM
A mass and energy analyzer for plasma diagnostics
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Catalysis and thermal analysis
SpaciMS
A spatially resolved capillary inlet mass spectrometer that determines species and temperature profiles, radially and axially, with high spatial and temporal resolution.
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TDSLab Series
UHV chamber with load lock and a HAL/3F PIC triple filter mass spectrometer. Heats to 1000°C at up to 40°C/min, and is designed for thin wafer-type samples. TPDsoft is standard.
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CATLAB-PCS
A bench-top microreactor and combined mass spectrometer system for rapid and reproducible catalyst characterization and reaction studies.
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3F PIC Triple-Filter Mass Spectrometers
The 3F PIC Series is designed for fast-event studies that demand high sensitivity and time resolution.
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Software
MASsoft Professional
Multilevel control software supplied with all Hiden instruments, allowing simple control of mass spectrometer parameters and complex manipulation of data.
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QGAsoft
Application specific software for quantitative gas and vapor analysis, giving real-time continuous analysis of up to 32 species from 0.1 ppm to 100%.
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EGAsoft
Data acquisition and analysis software for evolved gas analysis, designed to simplify measurements from devices such as thermogravimetric analyzers.
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TPDsoft
Thermal analysis PC software for control and analysis of TPD experiments, with automatic control of sample temperature integrated with analyzer control.
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CATLAB software
Software for the Hiden CATLAB systems, controlling MS data acquisition alongside devices such as MFCs, furnace temperature and switching valves.
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ESPionsoft Software
ESPionsoft Windows® Software
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EP-Replayer
Data replay for predictive End Point and process optimization
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Talk to an applications engineer.
Describe the experiment. An applications engineer reads it personally and typically replies within one business day.
Or call 1-888-96-HIDEN, Monday to Friday, 8:30am to 5pm ET.