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Products.

Every Hiden instrument and software package, grouped by product line. Every system is configured to the measurement rather than sold off a shelf.

HPR-20 gas analysis systems

  • Hiden HPR-20 R&D

    HPR-20 R&D

    A benchtop triple filter mass spectrometer for monitoring evolved gases and vapors, with improved resolution and abundance sensitivity.

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  • Hiden HPR-20 TMS

    HPR-20 TMS

    A transient mass spectrometer configured for fast event analysis of gases and vapors at pressures near atmosphere, ideal for fast gas switching experiments.

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  • Hiden HPR-20 EGA

    HPR-20 EGA

    A gas analysis system for continuous analysis of evolved gases and vapors from thermogravimetric analyzers, with interfaces for most TGA instruments.

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  • Hiden HPR-20 OEMS

    HPR-20 OEMS

    A system for continuous analysis of evolved gases and vapors in electrochemistry as a function of the applied potential on the real-time scale.

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  • Hiden HPR-20 DLS

    HPR-20 DLS

    A gas analysis system for ultra-high resolution and sensitivity analysis of hydrogen isotopes and light gases, built around the DLS-20 triple filter quadrupole.

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  • Hiden HPR-20 EPIC

    HPR-20 EPIC

    A gas analysis system with a triple filter mass spectrometer and a pulse ion counting detector for positive and negative ion detection.

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  • Hiden HPR-20 S1000

    HPR-20 S1000

    A gas analysis system with a triple filter quadrupole mass spectrometer of 1000 amu mass range and detection capability of less than 5 ppb.

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QGA and QIC

  • Hiden QGA 2.0

    QGA 2.0

    A compact quantitative gas analyzer, optimized for continuous analysis of gases and vapors in near atmospheric pressures.

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  • Hiden QIC BioStream

    QIC BioStream

    A special multi-stream system configuration for fermentation off-gas analysis, with software calculating oxygen uptake rate, carbon dioxide expiration rate and respiratory quotient.

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  • Hiden QIC Multistream

    QIC Multistream

    Gas analysis systems for multi-stream analysis, with a laboratory scale valve for up to 16 sample lines or a process valve for up to 80 sample lines.

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  • Hiden carbon monoxide analyzer module

    Carbon Monoxide (CO) Analyzer

    Quantitative CO Analysis for Complex Gas Mixtures

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  • Hiden compact gas analyzer

    Compact Gas Analyzers

    For less demanding applications Hiden Analytical offer compact gas analyzers

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Specialist gas and dissolved species systems

  • Hiden HPR-40 DEMS

    HPR-40 DEMS

    A modular benchtop or mobile cart mounted system for analysis of dissolved species in electrochemistry, with differential electrochemical mass spectrometry cell inlets.

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  • Hiden HPR-40 MIMS

    HPR-40 MIMS

    A compact benchtop membrane inlet mass spectrometer system for quantitative analysis and monitoring of dissolved and evolved gases.

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  • Hiden HPR-30 Series

    HPR-30 Series

    Vacuum process gas analyzers designed for fast response, high sensitivity analysis of gas and vapor species in vacuum processes.

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  • Hiden pQA Portable Quadrupole Analyzer

    pQA Portable Quadrupole Analyzer

    A compact, transportable, ruggedized case mounted gas analyzer configured for environmental field studies, using membrane inlet mass spectrometry.

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Residual gas analyzers

  • HALO 201 residual gas analyzer

    HALO Residual Gas Analyzer

    The Hiden HALO Residual Gas Analyzer (RGA) is designed for routine vacuum monitoring, chamber fingerprinting, leak detection, and trend analysis.

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  • HAL RC residual gas analyzer with vacuum fired ion source

    HAL 201 RC

    A Residual Gas Analyzer configured for demanding UHV applications

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  • Hiden RGA Series

    RGA Series

    A broad range of quadrupole residual gas analyzers for contamination monitoring, leak detection and analysis of the species within the vacuum chamber.

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  • 3F Series 1000 triple-filter quadrupole RGA

    3F Series Triple-Filter Quadrupole Mass Spectrometers

    The Hiden 3F and 1000 Series are high-precision triple-filter quadrupole mass spectrometers for analytical residual gas and process applications.

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  • Hiden HALO 201 MBE

    HALO 201 MBE

    A residual gas analyzer for molecular beam epitaxy, built for prolonged use in MBE environments with molybdenum wiring and a contamination resistant ion source shroud.

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  • Hiden LAS Leak Analysis System

    LAS Leak Analysis System

    An automated leak analysis system for quality control or R&D, designed to test the leak tightness of small to medium size battery assemblies.

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  • HMT dual mode high pressure RGA

    HMT

    A dual mode RGA system for vacuum diagnostics and process monitoring

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  • IDP ion desorption probe with cryo shroud

    IDP Ion Desorption Probe

    The Hiden IDP is a quadrupole ion desorption probe for direct analysis of low-energy ions, neutrals and radicals generated in UHV surface science experiments.

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  • Standard and UHV low-profile RGA ion sources

    Ion Source Options for Residual Gas Analyzers

    Hiden offers interchangeable electron impact and application-specific ion sources for configuring residual gas analyzers around pressure, sample geometry and gas chemistry.

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  • EPIC 6 mm and 9 mm gauges with RF heads

    EPIC Research-Grade UHV and XHV Mass Spectrometer

    The Hiden EPIC and EPIC 1000 Series extend high-performance residual gas analysis to neutrals, radicals and positive or negative ions.

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Instrument for Fusion Research

  • Hiden DLS-1

    DLS-1

    A mass spectrometer for real-time quantitative analysis of complex gas and vapor mixtures in fusion applications, using TIMS recipes for hydrogen and helium isotopes.

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  • Hiden DLS-2/DLS-2X

    DLS-2/DLS-2X

    The radiation-hardened DLS-2 features remote electronics up to 140 m away, ITER-tested radiation resistance, high-resolution mass analysis, and optional magnetic shielding and specialized cable sets for demanding radiation environments.

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  • Hiden DLS-20

    DLS-20

    A dual-zone switching ultra-high resolution quadrupole mass spectrometer for the analysis of hydrogen and helium isotopes and light gases.

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  • Hiden HAL 101X

    HAL 101X

    A residual gas analyzer for synchrotron, accelerator and tokamak or torus applications in harsh radiation environments, with no active electronics near the gauge.

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Surface analysis and SIMS

  • EQS electrostatic quadrupole SIMS analyzer

    EQS

    A system for the analysis of secondary positive and negative ions from solid samples

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  • Hiden SIMS Workstation

    SIMS Workstation

    High performance static and dynamic SIMS for surface composition analysis and depth profiling, with SNMS for quantification in thin film measurements.

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  • Hiden AutoSIMS

    AutoSIMS

    A self-contained automated SIMS tool for routine and repetitive surface analysis of thin films, contamination and doping, in conductive and insulating material.

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  • Hiden Dual Polarity SIMS Workstation

    Dual Polarity SIMS Workstation

    The Dual Polarity SIMS Workstation simultaneously detects positive and negative ions using two opposing EQS spectrometers. Designed for ultra-thin layer analysis and battery research, it is ideal for studying materials such as the solid electrolyte interphase (SEI) layer.

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  • Hiden Compact SIMS

    Compact SIMS

    A SIMS tool designed for fast and reliable characterization of layer structures, surface contamination and impurities, with sensitive positive ion detection.

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  • Hiden FIB-SIMS

    FIB-SIMS

    FIB-SIMS integrates Hiden’s EQS-FIB 1000 SIMS probe with existing FIB systems, delivering 50 nm lateral and 5 nm depth resolution with standard and custom platform interfaces.

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  • Hiden ToF-qSIMS Workstation

    ToF-qSIMS Workstation

    A time of flight quadrupole SIMS system offering static ToF-SIMS capabilities and high dynamic range depth profiling from the quadrupole SIMS.

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  • Hi5 dual polarity FIB-SIMS custom instrument

    Custom SIMS Solutions

    The low extraction field characteristics and modular nature of Hiden quadrupole SIMS spectrometers, coupled with an experienced custom design team, allow specialist surface analysis tools to be realized; whether adding SIMS to an existing system or designing a complete instrument from scratch.

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  • IG20 argon and oxygen ion gun

    IG20

    A 5keV Argon or Oxygen ion source for UHV surface analysis applications

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  • IG5C cesium ion gun

    IG5C

    A 5keV Cesium ion gun for UHV surface analysis applications

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  • MAXIM SIMS analyzer during sample analysis

    MAXIM

    A system for static and dynamic SIMS and SNMS applications

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  • Modular SIMS instrument on a single flange

    Modular SIMS

    Add high performance SIMS capability to your surface analysis chamber

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  • XPS upgrade on the Hiden SIMS Workstation

    XPS for SIMS

    A multi-technique UHV surface science system option providing for XPS, UPS, AES, SAM, ISS and LEIS installed on the Hiden SIMS Workstation

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Plasma and thin film process monitoring

  • Hiden EQP Series

    EQP Series

    A quadrupole mass spectrometer series for direct analysis of plasma ion mass and energy, measuring ions, neutrals and radicals from plasma.

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  • Hiden ESPion

    ESPion

    An advanced Langmuir probe for plasma diagnostics, measuring electrical properties of plasmas such as plasma potential, floating potential and electron temperature.

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  • Hiden IMP-EPD

    IMP-EPD

    A differentially pumped, ruggedized secondary ion mass spectrometer for end point detection in the ion beam etch process.

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  • Hiden XBS

    XBS

    A quadrupole mass spectrometer for monitoring multiple beam sources simultaneously, serving as a deposition rate monitor for molecular beam analysis and deposition control.

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  • Hiden HPR-60 MBMS

    HPR-60 MBMS

    A compact skimmer inlet molecular beam mass spectrometer for the analysis of reactive gas phase intermediates.

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  • PSM plasma mass and energy analyzer

    PSM

    A mass and energy analyzer for plasma diagnostics

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Catalysis and thermal analysis

  • Hiden SpaciMS

    SpaciMS

    A spatially resolved capillary inlet mass spectrometer that determines species and temperature profiles, radially and axially, with high spatial and temporal resolution.

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  • Hiden TDSLab Series

    TDSLab Series

    UHV chamber with load lock and a HAL/3F PIC triple filter mass spectrometer. Heats to 1000°C at up to 40°C/min, and is designed for thin wafer-type samples. TPDsoft is standard.

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  • Hiden CATLAB-PCS

    CATLAB-PCS

    A bench-top microreactor and combined mass spectrometer system for rapid and reproducible catalyst characterization and reaction studies.

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  • 3F PIC triple-filter quadrupole mass spectrometer

    3F PIC Triple-Filter Mass Spectrometers

    The 3F PIC Series is designed for fast-event studies that demand high sensitivity and time resolution.

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Software

  • Hiden MASsoft Professional

    MASsoft Professional

    Multilevel control software supplied with all Hiden instruments, allowing simple control of mass spectrometer parameters and complex manipulation of data.

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  • Hiden QGAsoft

    QGAsoft

    Application specific software for quantitative gas and vapor analysis, giving real-time continuous analysis of up to 32 species from 0.1 ppm to 100%.

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  • Hiden EGAsoft

    EGAsoft

    Data acquisition and analysis software for evolved gas analysis, designed to simplify measurements from devices such as thermogravimetric analyzers.

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  • Hiden TPDsoft

    TPDsoft

    Thermal analysis PC software for control and analysis of TPD experiments, with automatic control of sample temperature integrated with analyzer control.

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  • Hiden CATLAB software

    CATLAB software

    Software for the Hiden CATLAB systems, controlling MS data acquisition alongside devices such as MFCs, furnace temperature and switching valves.

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  • ESPionsoft acquisition parameters wizard screen

    ESPionsoft Software

    ESPionsoft Windows® Software

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  • Semiconductor manufacturing cleanroom

    EP-Replayer

    Data replay for predictive End Point and process optimization

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Talk to an applications engineer.

Describe the experiment. An applications engineer reads it personally and typically replies within one business day.

Or call 1-888-96-HIDEN, Monday to Friday, 8:30am to 5pm ET.