Instruments.
15 in this area
RGA Series
A broad range of quadrupole residual gas analyzers for contamination monitoring, leak detection and analysis of the species within the vacuum chamber.
Residual gas analysisLeak detectionDesorption+4 more
HALO Residual Gas Analyzer
The Hiden HALO Residual Gas Analyzer (RGA) is designed for routine vacuum monitoring, chamber fingerprinting, leak detection, and trend analysis.
Residual gas analysisLeak detectionDesorption+5 more
HMT
A dual mode RGA system for vacuum diagnostics and process monitoring
Residual gas analysisVacuum processingNear atmospheric XPS, APXPS+2 more
HAL 201 RC
A Residual Gas Analyzer configured for demanding UHV applications
Residual gas analysisLeak detectionDesorption+4 more
HALO 201 MBE
A residual gas analyzer for molecular beam epitaxy, built for prolonged use in MBE environments with molybdenum wiring and a contamination resistant ion source shroud.
III-V and II-VI materialsSemiconductorsFuel cells+3 more
IDP Ion Desorption Probe
The Hiden IDP is a quadrupole ion desorption probe for direct analysis of low-energy ions, neutrals and radicals generated in UHV surface science experiments.
Surface scienceCatalysis
3F Series Triple-Filter Quadrupole Mass Spectrometers
The Hiden 3F and 1000 Series are high-precision triple-filter quadrupole mass spectrometers for analytical residual gas and process applications.
Thermal analysis MSCatalysisTDP / TPR / TPO+5 more
XBS
A quadrupole mass spectrometer for monitoring multiple beam sources simultaneously, serving as a deposition rate monitor for molecular beam analysis and deposition control.
MBE monitoring and controlMolecular beam studiesMultiple beam source analysis+5 more
3F PIC Triple-Filter Mass Spectrometers
The 3F PIC Series is designed for fast-event studies that demand high sensitivity and time resolution.
UHV TPDSurface scienceSingle crystal studies+6 more
DLS-1
A mass spectrometer for real-time quantitative analysis of complex gas and vapor mixtures in fusion applications, using TIMS recipes for hydrogen and helium isotopes.
Fusion researchTokamak and torus fusion research
DLS-2/DLS-2X
The radiation-hardened DLS-2 features remote electronics up to 140 m away, ITER-tested radiation resistance, high-resolution mass analysis, and optional magnetic shielding and specialized cable sets for demanding radiation environments.
DLS-20
A dual-zone switching ultra-high resolution quadrupole mass spectrometer for the analysis of hydrogen and helium isotopes and light gases.
Fusion researchIsotope studiesSynchrotron studies+2 more
HAL 101X
A residual gas analyzer for synchrotron, accelerator and tokamak or torus applications in harsh radiation environments, with no active electronics near the gauge.
Fusion researchResidual gas analysisLeak detection+5 more
Ion Source Options for Residual Gas Analyzers
Hiden offers interchangeable electron impact and application-specific ion sources for configuring residual gas analyzers around pressure, sample geometry and gas chemistry.
Thermal analysis TA/MSCatalysis studiesReaction kinetics+3 more
EPIC Research-Grade UHV and XHV Mass Spectrometer
The Hiden EPIC and EPIC 1000 Series extend high-performance residual gas analysis to neutrals, radicals and positive or negative ions.
Surface scienceThin film & surface engineeringCatalysis+2 more