Nanotechnology.

High performance static and dynamic SIMS for surface composition analysis and depth profiling, with SNMS for quantification in thin film measurements.

A compact skimmer inlet molecular beam mass spectrometer for the analysis of reactive gas phase intermediates.

A modular benchtop or mobile cart mounted system for analysis of dissolved species in electrochemistry, with differential electrochemical mass spectrometry cell inlets.

A quadrupole mass spectrometer for monitoring multiple beam sources simultaneously, serving as a deposition rate monitor for molecular beam analysis and deposition control.

A bench-top microreactor and combined mass spectrometer system for rapid and reproducible catalyst characterization and reaction studies.

UHV chamber with load lock and a HAL/3F PIC triple filter mass spectrometer. Heats to 1000°C at up to 40°C/min, and is designed for thin wafer-type samples. TPDsoft is standard.

FIB-SIMS integrates Hiden’s EQS-FIB 1000 SIMS probe with existing FIB systems, delivering 50 nm lateral and 5 nm depth resolution with standard and custom platform interfaces.

A self-contained automated SIMS tool for routine and repetitive surface analysis of thin films, contamination and doping, in conductive and insulating material.

An advanced Langmuir probe for plasma diagnostics, measuring electrical properties of plasmas such as plasma potential, floating potential and electron temperature.