Instruments.
6 in this area
EQP Series
A quadrupole mass spectrometer series for direct analysis of plasma ion mass and energy, measuring ions, neutrals and radicals from plasma.
Analysis of ions and radicalsEtching and deposition studiesIon implantation+11 more
ESPion
An advanced Langmuir probe for plasma diagnostics, measuring electrical properties of plasmas such as plasma potential, floating potential and electron temperature.
Plasma characterizationPlasma potentialFloating potential+4 more
IMP-EPD
A differentially pumped, ruggedized secondary ion mass spectrometer for end point detection in the ion beam etch process.
End point analysisTarget impurity determinationQuality control and SPC+5 more
XBS
A quadrupole mass spectrometer for monitoring multiple beam sources simultaneously, serving as a deposition rate monitor for molecular beam analysis and deposition control.
MBE monitoring and controlMolecular beam studiesMultiple beam source analysis+5 more
HPR-60 MBMS
A compact skimmer inlet molecular beam mass spectrometer for the analysis of reactive gas phase intermediates.
Plasma characterizationGas reaction kineticsEnvironmental studies+5 more
PSM
A mass and energy analyzer for plasma diagnostics
Plasma CharacterizationPlasma Etching and ALEHiPIMS+3 more