Instruments.
10 in this area
HALO Residual Gas Analyzer
The Hiden HALO Residual Gas Analyzer (RGA) is designed for routine vacuum monitoring, chamber fingerprinting, leak detection, and trend analysis.
Residual gas analysisLeak detectionDesorption+5 more
HAL 201 RC
A Residual Gas Analyzer configured for demanding UHV applications
Residual gas analysisLeak detectionDesorption+4 more
RGA Series
A broad range of quadrupole residual gas analyzers for contamination monitoring, leak detection and analysis of the species within the vacuum chamber.
Residual gas analysisLeak detectionDesorption+4 more
3F Series Triple-Filter Quadrupole Mass Spectrometers
The Hiden 3F and 1000 Series are high-precision triple-filter quadrupole mass spectrometers for analytical residual gas and process applications.
Thermal analysis MSCatalysisTDP / TPR / TPO+5 more
HALO 201 MBE
A residual gas analyzer for molecular beam epitaxy, built for prolonged use in MBE environments with molybdenum wiring and a contamination resistant ion source shroud.
III-V and II-VI materialsSemiconductorsFuel cells+3 more
LAS Leak Analysis System
An automated leak analysis system for quality control or R&D, designed to test the leak tightness of small to medium size battery assemblies.
Automated battery leak testingLeak tightness analysis of small to medium size battery assembliesBattery quality control and R&D
HMT
A dual mode RGA system for vacuum diagnostics and process monitoring
Residual gas analysisVacuum processingNear atmospheric XPS, APXPS+2 more
IDP Ion Desorption Probe
The Hiden IDP is a quadrupole ion desorption probe for direct analysis of low-energy ions, neutrals and radicals generated in UHV surface science experiments.
Surface scienceCatalysis
Ion Source Options for Residual Gas Analyzers
Hiden offers interchangeable electron impact and application-specific ion sources for configuring residual gas analyzers around pressure, sample geometry and gas chemistry.
Thermal analysis TA/MSCatalysis studiesReaction kinetics+3 more
EPIC Research-Grade UHV and XHV Mass Spectrometer
The Hiden EPIC and EPIC 1000 Series extend high-performance residual gas analysis to neutrals, radicals and positive or negative ions.
Surface scienceThin film & surface engineeringCatalysis+2 more