Instruments.
13 in this area
EQS
A system for the analysis of secondary positive and negative ions from solid samples
FIB-SIMS for Nano-Scale Materials AnalysisBattery ResearchNuclear Materials+2 more
SIMS Workstation
High performance static and dynamic SIMS for surface composition analysis and depth profiling, with SNMS for quantification in thin film measurements.
CatalysisSurface analysisThin film and surface engineering+3 more
AutoSIMS
A self-contained automated SIMS tool for routine and repetitive surface analysis of thin films, contamination and doping, in conductive and insulating material.
Thin filmsSurface modificationCoating+4 more
Dual Polarity SIMS Workstation
The Dual Polarity SIMS Workstation simultaneously detects positive and negative ions using two opposing EQS spectrometers. Designed for ultra-thin layer analysis and battery research, it is ideal for studying materials such as the solid electrolyte interphase (SEI) layer.
Energy materials, solar and fuel cellsMetallurgy, corrosion and passivationFailure analysis, surface chemistry, defect identification, functional coatings
Compact SIMS
A SIMS tool designed for fast and reliable characterization of layer structures, surface contamination and impurities, with sensitive positive ion detection.
Solar cellsGlass coatingMetallic thin films
FIB-SIMS
FIB-SIMS integrates Hiden’s EQS-FIB 1000 SIMS probe with existing FIB systems, delivering 50 nm lateral and 5 nm depth resolution with standard and custom platform interfaces.
FIB-SIMSBattery research, detection of lithium using SIMS on a FIB microscopeStatic and dynamic SIMS analysis+7 more
ToF-qSIMS Workstation
A time of flight quadrupole SIMS system offering static ToF-SIMS capabilities and high dynamic range depth profiling from the quadrupole SIMS.
Surface analysisThin film and surface engineeringSurface science+5 more
Custom SIMS Solutions
The low extraction field characteristics and modular nature of Hiden quadrupole SIMS spectrometers, coupled with an experienced custom design team, allow specialist surface analysis tools to be realized; whether adding SIMS to an existing system or designing a complete instrument from scratch.
Isotopically Labeled MaterialQuadrupole Mass Spectrometers for Thin Films and Surface EngineeringUHV Surface Science
IG20
A 5keV Argon or Oxygen ion source for UHV surface analysis applications
Thin Films Optical CoatingElectronic MaterialsNuclear Materials
IG5C
A 5keV Cesium ion gun for UHV surface analysis applications
Thin Films Optical CoatingElectronic Materials
MAXIM
A system for static and dynamic SIMS and SNMS applications
Surgical StentFlexible Solar Cell
Modular SIMS
Add high performance SIMS capability to your surface analysis chamber
Quadrupole Mass Spectrometers for Thin Films and Surface EngineeringNuclear MaterialsUHV Surface Science
XPS for SIMS
A multi-technique UHV surface science system option providing for XPS, UPS, AES, SAM, ISS and LEIS installed on the Hiden SIMS Workstation
UHV Surface Science