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HPR-30 Series.

Vacuum process gas analyzers designed for fast response, high sensitivity analysis of gas and vapor species in vacuum processes.

1000 amu
Maximum mass range
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Hiden HPR-30 Series
HPR-30 Series · Thin films, plasma and surface engineering

Overview.

The HPR-30 Series systems are designed for fast response, high sensitivity analysis of gas and vapor species in vacuum processes. They are equipped with Hiden’s multi-level software package, offering simple control of mass spectrometer parameters and complex manipulation of data and control of external devices.

Applications include leak detection, contamination monitoring, process trend analysis and analysis of high mass species and precursors used in ALD and MOCVD.

Optional upgrades include the Hiden 3F series triple filter quadrupole system, providing enhanced abundance sensitivity, part-per-billion detection levels and high contamination resistance, particularly suited to the analysis of aggressive gases in CVD and RIE applications.

Typical applications

Plasma studiesFreeze dryingCVD/MOCVD/ALDVacuum processingResidual gas analysis

Key Features.

  • Custom inlet systems with optimized sampling for metals and metal organic vapors
  • High mass range options of 500 and 1000 amu
  • High sensitivity RGA for UHV quality chamber base pressure measurements and leak detection
  • Re-entrant sampling orifice for fast response to process gas and vapor composition changes
  • Gas and vapor sampling systems optimized for response and sensitivity over a wide pressure range

Specifications.

Analyzer
3F series triple filter quadrupole system available as an optional upgrade
Mass range options
High mass range options of 500 and 1000 amu
Detection limit
Part-per-billion (ppb) detection levels with the optional 3F series triple filter system
Standard inlet
Re-entrant sampling orifice
Sampling pressure
Sampling systems optimized for response and sensitivity over a wide pressure range
Format
In situ, differentially pumped gas analyzer
Control software
MASsoft Professional

Downloads.

Hiden's published documents for this instrument.

Thin films, plasma and surface engineering product catalog pdf

Related instruments.

  • RGA Series

    A broad range of quadrupole residual gas analyzers for contamination monitoring, leak detection and analysis of the species within the vacuum chamber.

  • EQP Series

    A quadrupole mass spectrometer series for direct analysis of plasma ion mass and energy, measuring ions, neutrals and radicals from plasma.

  • HPR-60 MBMS

    A compact skimmer inlet molecular beam mass spectrometer for the analysis of reactive gas phase intermediates.

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