TDSLab Series.
UHV chamber with load lock and a HAL/3F PIC triple filter mass spectrometer. Heats to 1000°C at up to 40°C/min, and is designed for thin wafer-type samples. TPDsoft is standard.
Key Features.
- TDSLab-6: 6 mm, 300 amu standard, 50 and 510 amu options. Hydrogen embrittlement, diffusible hydrogen in steel, corrosion.
- TDSLab-9: 9 mm, 1000 amu standard, 50 and 5000 amu options, about 5x the sensitivity of the 6 mm. Photovoltaic, semiconductor, high mass.
- TDSLab-20: 20 mm, Zone H+I. Fusion, tritium retention, He/D₂.
Talk to an applications engineer.
Describe the experiment. An applications engineer reads it personally and typically replies within one business day.
Or call 1-888-96-HIDEN, Monday to Friday, 8:30am to 5pm ET.