Residual Gas Analysis Mass Spectrometry
The most extensive range of precision Residual Gas Analyzers available. Backed by a 3 year warranty and life time support, Hiden Analytical’s RGAs are recognized for their sensitivity, speed and response accuracy.
Advanced Equipment for Residual Gas Analysis
Hiden Inc. is a respected developer, manufacturer, supplier, and champion of scientific equipment for RGA. Our high-performance mass spectrometers are used in a wide variety of scientific applications where precision, stability and accuracy at both the atomic and molecular level are paramount.
Our products, workstations, and probes remain the core of many institutions— we hope they will serve yours equally.
Hiden Inc.’s Mass Spectrometers For Sale
RGA Series – Single and Triple Filter Quadrupole Mass Spectrometers
Mass Range: 50, 100, 200, 300 and 510 amu
Detection Range: Analog and Pulse Ion Counting detectors for minimum detectable concentrations of 2 x 10 -13, 2 x 10-14 and 2 x 10-15 mbar.
Ion Source Options:
- Standard RGA – General Vacuum Applications
- UHV Low Profile – for UHV TPD Studies
- Closed – for differentially pumped direct gas input
- Cross-beam – for MBE, Laser Ionization, Condensable Gas Beams
- Ion-optics – for Electron, Photon and Laser Stimulated Studies
- Pt/Au Ionizers – for Reactive Gases and minimal Outgassing
Applications
- Residual gas analysis
- Leak Detection
- Desorption
- Outgassing studies
- Bakeout cycles
- Pump performance
- Process gas contaminants
HMT
Applications
- PVD
- Thin Film
- Sputtering
- RGA
- Vacuum Processing
HALO 201 MBE
Applications
- III-V / II-VI Materials
- Semiconductors
- Fuel Cells
XBS
Multiple source deposition monitoring in MBE applications high contamination resistant purpose designed quadrupole for deposition rate monitoring, effusive source quality analysis and high performance vacuum diagnostics.
Applications
- MBE Monitoring + Control
- Molecular Beam Studies
- Multiple Beam Source Analysis
- High Performance
- Residual Gas Analysis
HAL 101X
Applications
- Fusion Research
- Residual Gas Analysis
- Leak Detection
- Desorption
- Outgassing Studies
- Bakeout Cycles
- Pump Performance
- Process Gas Contaminants
EPIC Series
Applications
- Surface Science
- Thin Film & Surface Engineering
- Catalysis
- Molecular Beam Studies
IDP
Applications
- Surface Science
- Catalysis
DLS-1
The DLS-1 (quadrupole residual gas analyzer) is designed for analysis of fusion system fuel delivery, and operates in TIMS mode. TIMS mode provides for control of the energy of the electrons emitted within the ionisation source, resulting in each species, D2 and 4He for example having a unique fingerprint that can be measured by the DLS-1. This mode of operation is known as Threshold Ionisation Mass Spectrometry (TIMS).
Applications
- Fusion Research
- Tokamak/Torus Fusion Research
DLS-10
Applications
- Fusion Research
- Isotope Studies
- Synchrotron Studies
- Nanotechnology
- Residual Gas Analysis
DLS-20
Applications
- Fusion Research
- Isotope Studies
- Synchrotron Studies
- Nanotechnology
- Residual Gas Analysis
Ion Source Options
Applications
- Thermal Analysis TA/MS
- Catalysis Studies
- Reaction Kinetics
- Fuel Cells
- CVD/MOCVD/ALCVD
- Environmental Monitoring
HAL 201 RC
Applications
- Residual Gas Analysis
- Leak Detection
- Desorption
- Outgassing Studies
- Bakeout Cycles
- Pump Performance
- Process Gas Contaminants
3F-PIC / 1000 Series PIC
Applications
- UHV TPD
- Surface Science
- Single Crystal Studies
- Molecular Beam Studies
- Flash Desorption Analysis
- High Performance RGA
- Desorption Studies
- Outgassing Studies
- Bakeout Cycles
- Process Contaminants
3F Series / 1000 Series RGA
A system for high precision scientific research and process applications. Measures the partial pressures of residual gases with ultra-high resolution and extended mass range options to 1000 AMU.
Applications
- Thermal Analysis MS
- Catalysis
- TPD / TPR / TPO
- Pulse Chemisorption
- Catalyst Screening
- Dispersion Measurements
- Adsorption Isotherms
- Reaction Studies