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XBS.

A quadrupole mass spectrometer for monitoring multiple beam sources simultaneously, serving as a deposition rate monitor for molecular beam analysis and deposition control.

320 or 510 amu
Maximum mass range
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Hiden XBS
XBS · Residual gas analysis

Overview.

The Hiden XBS is a quadrupole mass spectrometer designed for monitoring multiple beam sources simultaneously, with beam acceptance through a 70° cone. Species-specific analog signals are used for beam intensity output to the users’ source control modules.

Beam acceptance apertures are configured individually for each specific process chamber source position. They are manufactured as replaceable plug-in elements to enable retrospective modification in the event of chamber alteration.

The XBS is designed with high contamination resistance for monitoring evaporating components and fragments in MBE processes, and is manufactured with a triple stage mass filter.

Typical applications

MBE monitoring and controlMolecular beam studiesMultiple beam source analysisHigh performance residual gas analysisPhotoionization studiesDesorption and outgassing studiesMonitoring and diagnostics of contaminants in the process chamberHigh-sensitivity helium leak check mode for vacuum quality verification

Key Features.

  • High sensitivity, with a minimum detectable partial pressure of 2.5x10⁻¹⁴ mbar
  • Mass range of 320 or 510 amu
  • Crossbeam ion source, beam acceptance through +/- 35° to transverse axis
  • Beam acceptance apertures configured for beam source positions
  • Optional water-cooled shroud

Specifications.

Analyzer
Quadrupole mass spectrometer
Mass range options
320 or 510 amu
Detection limit
Minimum detectable partial pressure of 2.5x10⁻¹⁴ mbar
Ionization
Crossbeam ion source, with beam acceptance through +/- 35° to the transverse axis
Standard inlet
Beam acceptance apertures configured individually for each process chamber source position, as replaceable plug-in elements
Control software
MASsoft Professional
Mass filter
Triple stage mass filter
Beam acceptance
Through a 70° cone
Probe shroud
Optional water-cooled shroud

Downloads.

Hiden's published documents for this instrument.

Thin films, plasma and surface engineering product catalog pdf Residual gas analysis product catalog pdf

Related instruments.

  • HALO 201 MBE

    A residual gas analyzer for molecular beam epitaxy, built for prolonged use in MBE environments with molybdenum wiring and a contamination resistant ion source shroud.

  • RGA Series

    A broad range of quadrupole residual gas analyzers for contamination monitoring, leak detection and analysis of the species within the vacuum chamber.

  • HPR-30 Series

    Vacuum process gas analyzers designed for fast response, high sensitivity analysis of gas and vapor species in vacuum processes.

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