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AutoSIMS.

A self-contained automated SIMS tool for routine and repetitive surface analysis of thin films, contamination and doping, in conductive and insulating material.

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Hiden AutoSIMS
AutoSIMS · Surface analysis (SIMS)

Overview.

The AutoSIMS is built around the same source and analyzer as the Compact SIMS, with the addition of a large sample holder and automated stage.

This allows it to perform automated analysis batches, running 24/7 and potentially making hundreds of analyzes per day. It can also be run in full manual mode, where the precision of the stage and large sample area make it attractive to the expert user.

It is suited to the measurement of thin films, contamination and doping from the top monolayer to micron depth, in both conductive and insulating material.

Typical applications

Thin filmsSurface modificationCoatingMap large areasThin film failure analysis and product verificationCorrosion and tribology investigationsStatic and dynamic SIMS

Key Features.

  • Fully automated, unattended SIMS analysis
  • Oxygen primary ion gun for sensitive analysis
  • Parameter entry by spreadsheet
  • Modular servicing for high up-time
  • Nanometer depth resolution
  • Optional electron flood gun allows analysis of insulators

Specifications.

Analyzer
Same analyzer as the Compact SIMS
Ionization
Static and dynamic SIMS
Format
Self-contained automated SIMS tool
Control software
Hiden MASsoft Professional and SIMS Mapper
Primary ion source
Oxygen primary ion gun
Throughput
Automated analysis batches, running 24/7, potentially hundreds of analyzes per day
Depth resolution
Nanometer
Charge compensation
Optional electron flood gun allows analysis of insulators

Downloads.

Hiden's published documents for this instrument.

Mass spectrometers for surface analysis catalog pdf SIMS applications catalog pdf

Related instruments.

  • Compact SIMS

    A SIMS tool designed for fast and reliable characterization of layer structures, surface contamination and impurities, with sensitive positive ion detection.

  • SIMS Workstation

    High performance static and dynamic SIMS for surface composition analysis and depth profiling, with SNMS for quantification in thin film measurements.

  • ToF-qSIMS Workstation

    A time of flight quadrupole SIMS system offering static ToF-SIMS capabilities and high dynamic range depth profiling from the quadrupole SIMS.

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