Dual Polarity SIMS Workstation.
The Dual Polarity SIMS Workstation simultaneously detects positive and negative ions using two opposing EQS spectrometers. Designed for ultra-thin layer analysis and battery research, it is ideal for studying materials such as the solid electrolyte interphase (SEI) layer.
Key Features.
- Dual EQS detectors can be fitted to any suitable sputter analysis chamber
- Allows efficient use of secondary ions and halves analysis time
- Images and depth profiles are accurately registered
Specifications.
- Analyzer
- Hiden DLS-20 mass spectrometer
- Ionization
- Simultaneous positive and negative ion analysis
- Control software
- Hiden MASsoft Professional and SIMS Mapper
- Primary ion source
- 40 nm oxygen plasma FIB ion gun
- Sample stage
- High precision five axis sample stage
- Mass peak resolution
- Capable of resolving mass peaks to 0.005 amu
Downloads.
Hiden's published documents for this instrument.
Related instruments.
SIMS Workstation
High performance static and dynamic SIMS for surface composition analysis and depth profiling, with SNMS for quantification in thin film measurements.
FIB-SIMS
FIB-SIMS integrates Hiden’s EQS-FIB 1000 SIMS probe with existing FIB systems, delivering 50 nm lateral and 5 nm depth resolution with standard and custom platform interfaces.
DLS-20
A dual-zone switching ultra-high resolution quadrupole mass spectrometer for the analysis of hydrogen and helium isotopes and light gases.
ToF-qSIMS Workstation
A time of flight quadrupole SIMS system offering static ToF-SIMS capabilities and high dynamic range depth profiling from the quadrupole SIMS.
Talk to an applications engineer.
Describe the experiment. An applications engineer reads it personally and typically replies within one business day.
Or call 1-888-96-HIDEN, Monday to Friday, 8:30am to 5pm ET.