HALO Residual Gas Analyzer.

The Hiden HALO Residual Gas Analyzer (RGA) is designed for routine vacuum monitoring, chamber fingerprinting, leak detection, and trend analysis. It tracks residual gases and vapors in real time, helping users identify air leaks, water vapor, hydrocarbons, and other potential contaminants.

Automated vacuum fingerprinting and residual gas trend analysis

HALO systems offer 100, 200 and 300 amu mass-range options with Faraday-only or dual Faraday/electron-multiplier detection. Minimum detectable partial pressures reach 1 × 10⁻¹¹ mbar with Faraday detection and 2 × 10⁻¹⁴ mbar with the electron multiplier. Automatic DeSat™ supports high-speed scans in the presence of saturating signals.

iRGA software provides automated identification of common residual gases, with trend, scan, leak detection, and maintenance modes. Vacuum fingerprint views and alarm functions make the platform suitable for repeatable checks, as well as investigation of changing chamber conditions.