HPR-60 analyzers and mass spectrometers for plasma research

Hiden Analytical develops and manufactures a wide range of mass spectrometers and probes for precision diagnostic and analysis capability in plasma research.

Plasma research is still a relatively new field of study, examining the state of charged particles of matter and resulting ionization, as well as, for example, ionization from the use of high-powered lasers. Hiden’s analyzers provide insight by measuring the parameters which characterize plasma in real time, with minimal perturbation, and across a range of energy and masses.

The use of plasma in the fields of manufacturing and processing has expanded greatly. For example, plasma is used in the etching of semiconductors, development of materials coatings, and surface treatment and modification. Each application being defined by the specific plasma conditions – with research grade instruments playing an important role in the determination and understanding of these conditions. In the following we will explore some of the analyzers and probes that Hiden Analytical provides to assist in plasma research:

EQP Mass Spectrometer & Energy Analyzer

The Hiden EQP is a combined mass spectrometer and energy analyzer. The EQP identifies negative and positive ions in plasma by both mass and energy, along with neutrals and radicals. It has applications in etching and deposition studies, ion implantation, laser ablation, and all plasma enhanced processes. The EQP includes a triple filter quadrupole with mass range options to include capability for cluster analysis.

PSM Plasma Ion Analyzer

The Hiden PSM Plasma Sampling Mass Spectrometer directly analyses the mass and energy of positive ions, neutral, and radicals, providing detailed plasma insight. This research can be used in plasma chemistry, nano particle detection, plasma etch end point detection, and pulsed laser deposition studies.

ESPion Langmuir Probe

The ESPion is designed to measure the electrical properties of low-pressure plasma, including the plasma potential, electron temperature, ion density, and ion flux. The ESPion is an advanced Langmuir probe – it provides detailed, real time information on the primary plasma parameters. It is offered with a range of linear translators to provide for spatially resolved analyses across the plasma volume with standard options offering from 300 mm to 900 mm movement. The ESPion features the fastest pulsed plasma specifications and highest blocking impedance available in commercial probes. 

HPR-60 MBMS Mass Spectrometer

The HPR-60 is a molecular beam mass spectrometer designed for analysis of plasma ion and radicals at atmospheric pressure. The HPR-60 MBMS provides for negative and positive ion analysis, with mass range options from 1-300 amu and up to 5000 amu for the analysis of clusters. It also features an integrated MCS mode option to accurately analyze pulsed plasma with a temporal resolution of 50 ns.

Plasma Analyzers from Hiden Analytical

Hiden Analytical has long standing and well established expertise in the development and manufacture of plasma analyzers. We have built a strong reputation building quality mass spectrometers for over 35 years. The devices we provide are leading the way in the field of plasma research, with practical applications including the measurement of plasma ions, neutrals, and radicals. If you would like more information on Hiden Analytical or our range of plasma analyzers, please send us a message.

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