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Compact SIMS.

A SIMS tool designed for fast and reliable characterization of layer structures, surface contamination and impurities, with sensitive positive ion detection.

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Hiden Compact SIMS
Compact SIMS · Surface analysis (SIMS)

Overview.

The Compact SIMS is designed for fast and reliable characterization of layer structures, surface contamination and impurities. Sensitive detection of positive ions is assisted by the oxygen primary ion beam, and the instrument provides isotopic sensitivity across the entire periodic table.

The ion gun geometry is chosen to provide nanometer depth resolution and near surface analysis. The instrument is self-contained, requiring only a standard electrical outlet for operation.

It is also described as a UHV surface analysis system for thin film depth profiling, featuring a 10 sample rotary carousel, an oxygen primary ion gun and positive ion measurements of layer structures, surface contamination and impurities.

Typical applications

Solar cellsGlass coatingMetallic thin films

Key Features.

  • Oxygen IG20 primary ion gun and 6 mm MAXIM spectrometer with positive ion detection
  • Manual rotary stage for high reliability and ease of use
  • Self-contained system (requires single phase 2 kW power supply)
  • Static and dynamic SIMS with 3D imaging
  • Optional electron gun and negative ion detection

Specifications.

Analyzer
6 mm MAXIM spectrometer with positive ion detection
Ionization
Oxygen primary ion beam assists sensitive detection of positive ions
Format
Self-contained system, requiring only a standard electrical outlet for operation
Control software
Hiden MASsoft Professional and SIMS Mapper
Primary ion source
Oxygen IG20 primary ion gun
Sample stage
Manual rotary stage
SIMS modes
Static and dynamic SIMS with 3D imaging
Options
Electron gun and negative ion detection

Downloads.

Hiden's published documents for this instrument.

Mass spectrometers for surface analysis catalog pdf SIMS applications catalog pdf

Related instruments.

  • AutoSIMS

    A self-contained automated SIMS tool for routine and repetitive surface analysis of thin films, contamination and doping, in conductive and insulating material.

  • SIMS Workstation

    High performance static and dynamic SIMS for surface composition analysis and depth profiling, with SNMS for quantification in thin film measurements.

  • ToF-qSIMS Workstation

    A time of flight quadrupole SIMS system offering static ToF-SIMS capabilities and high dynamic range depth profiling from the quadrupole SIMS.

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