Custom SIMS Solutions.

The low extraction field characteristics and modular nature of Hiden quadrupole SIMS spectrometers, coupled with an experienced custom design team, allow specialist surface analysis tools to be realized; whether adding SIMS to an existing system or designing a complete instrument from scratch.

Hi5 dual polarity FIB-SIMS custom instrument
Custom SIMS Solutions · Surface analysis (SIMS)

Overview.

The low extraction field characteristics and modular nature of Hiden quadrupole SIMS spectrometers, coupled with an experienced custom design team, allow specialist surface analysis tools to be realized; whether adding SIMS to an existing system or designing a complete instrument from scratch.

The modular nature of Hiden products allows us to efficiently custom design instruments for specific applications and locations.

The Hi5 dual polarity FIB SIMS tool combines two EQS spectrometers, one collecting positive ions and the other negative ions, the DLS-20 high mass resolution quadrupole, and a third party plasma FIB, on a vibration isolated platform with five axis nanometer precision stage. In-situ micro-manipulator electrical connections, sample heating and cooling and an isotopically pure gas module (O18) allow diffusion studies in fuel cells, batteries and metals.

The modular SIMS is a complete SIMS instrument on a single flange (DN150mm and greater) combining an ion gun, EQS spectrometer, electron gun, light and camera module and retractable sample current monitor.

Typical applications

Isotopically Labeled MaterialQuadrupole Mass Spectrometers for Thin Films and Surface EngineeringUHV Surface Science

Key Features.

  • Custom systems use standard UHV components
  • Software is the same as that used on the SIMS workstation
  • 3D characterization
  • Nanometer depth resolution
  • Integration with third party ion guns, XPS, other instruments
  • Full 3D CAD design and modeling
  • Experience in both research and production integration

Related instruments.

  • EQS

    A system for the analysis of secondary positive and negative ions from solid samples

  • IG20

    A 5keV Argon or Oxygen ion source for UHV surface analysis applications

  • IG5C

    A 5keV Cesium ion gun for UHV surface analysis applications

Talk to an applications engineer.

Describe the experiment. An applications engineer reads it personally and typically replies within one business day.

Or call 1-888-96-HIDEN, Monday to Friday, 8:30am to 5pm ET.