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EQP Series.

A quadrupole mass spectrometer series for direct analysis of plasma ion mass and energy, measuring ions, neutrals and radicals from plasma.

5000 amu
Maximum mass range
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Hiden EQP Series
EQP Series · Thin films, plasma and surface engineering

Overview.

The Hiden EQP Series quadrupole mass spectrometer systems are designed for direct analysis of plasma ion mass and energy in both plasma characterization and process diagnostic applications. They measure both positive and negative ions.

The integral electron bombardment ion source enables neutrals analysis and features an advanced appearance potential scanning routine. An Electron Attachment Ionization mode is developed specifically for studies of electro-negative species.

The series includes the EQP-6, with 6 mm quadrupole rod diameter and based on the Hiden triple filter analyzer, the EQP-9, and the EQP-20, which has a 20 mm rod diameter quadrupole and switchable dual RF zone modes.

Typical applications

Analysis of ions and radicalsEtching and deposition studiesIon implantationLaser ablationPlasma up-scalingResidual gas analysis (RGA)HiPIMSECR (electron cyclotron discharge) plasmaMagnetron dischargeHelicon sourceDC glow discharge plasmaPulsed plasmaParallel plate RF plasmaICP (inductively coupled plasma)

Key Features.

  • Positive and negative ion analysis
  • Appearance potential spectra for radicals analysis
  • Electron attachment ionization mode option for analysis of electronegative radicals
  • Magnetic shielding options for operation in magnetically confined plasmas
  • Integral RGA mode for measurement of process neutrals, process contamination and leak detection
  • Integral sector field energy analyzer for ion energy distributions
  • MASsoft Professional PC software
  • Optional integrated 50 ns Time Resolved Mode for HiPIMS and pulsed plasma studies

Specifications.

Analyzer
Quadrupole mass spectrometer
Mass range options
EQP-6: 300 and 510 amu. EQP-9: 50, 300, 510, 1000 and 5000 amu
Ionization
Integral electron bombardment ion source
Standard inlet
Interchangeable sampling orifice mounted in the probe tip
Sampling pressure
Standard orifices up to 0.5 mbar with 60 l/s differential pumping. Options extend this to 2.0 mbar, 20 mbar, 100 mbar and atmospheric sampling
Control software
MASsoft Professional PC software
Energy analyzer
Integral sector field energy analyzer for ion energy distributions
Energy range
100 eV as standard, 1000 eV optional
EQP-20 capability
Designed for ultra-high mass resolution experiments such as the separation of He and D2 by mass, and ultra-high stability analysis up to 200 amu
Probe insertion
Plasma sampling orifice insertion can be extended up to 750 mm
Time resolved mode
Optional integrated 50 ns Time Resolved Mode for HiPIMS and pulsed plasma studies
Electron attachment ionization
Optional mode for analysis of electronegative radicals

Downloads.

Hiden's published documents for this instrument.

Thin films, plasma and surface engineering product catalog pdf Atmospheric plasma applications pdf

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  • HPR-30 Series

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