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ESPion.

An advanced Langmuir probe for plasma diagnostics, measuring electrical properties of plasmas such as plasma potential, floating potential and electron temperature.

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Hiden ESPion
ESPion · Thin films, plasma and surface engineering

Overview.

The ESPion Langmuir probe provides for measurement of the electrical properties of plasmas including plasma potential, floating potential, electron temperature, electron density, ion density, electron energy distribution and ion flux.

Routine monitoring of the I-V plasma characteristic gives direct information relating to plasma stability and reproducibility. Automatic real-time extrapolation of plasma parameters gives detailed information on plasma properties for use in characterization and uniformity monitoring.

The ESPion system employs Orbital Motion Limited (OML) and Allen Boyd Reynolds (ABR) as standard plasma models for low pressure plasma characterization. The automatic Z-drive provides for spatially resolved measurements across the plasma volume, with standard translation options of 300, 600 and 900 mm.

Typical applications

Plasma characterizationPlasma potentialFloating potentialElectron temperatureIon densityElectron energy distributionIon flux

Key Features.

  • Ion and electron density over the range 10¹⁴ to 10¹⁹ m⁻³
  • Electron temperature up to 10 eV
  • Electron Energy Distribution Function (EEDF)
  • Plasma potential
  • Floating potential
  • Debye length
  • Developed for pulsed, DC, RF and ECR plasma
  • Integrated signal gating for pulsed plasma analysis

Specifications.

Analyzer
Langmuir probe
Ion and electron density range
10¹⁴ to 10¹⁹ m⁻³
Electron temperature
Up to 10 eV
Plasma models
Orbital Motion Limited (OML) and Allen Boyd Reynolds (ABR) as standard, for low pressure plasma characterization
Z-drive translation options
300, 600 and 900 mm standard
Plasma types
Developed for pulsed, DC, RF and ECR plasma, with integrated signal gating for pulsed plasma analysis
Plasma pressure
Low and high pressure plasma

Downloads.

Hiden's published documents for this instrument.

Thin films, plasma and surface engineering product catalog pdf

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