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HAL 201 RC.

A Residual Gas Analyzer configured for demanding UHV applications

200 amu
Mass range (HAL 201 RC)
1 x 10⁻¹⁵ mbar
Minimum detectable partial pressure
1 x 10⁻⁴ mbar
Maximum operating pressure
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HAL RC residual gas analyzer with vacuum fired ion source
HAL 201 RC · Residual gas analysis

Overview.

The Hiden RGA for UHV are designed and configured for residual gas analysis in demanding UHV applications including beam lines, particle accelerators, synchrotrons, and other applications where critical measurements at UHV are required.

The HAL 201 RC analyzer features vacuum fired ion sources as standard, treated using Hiden’s proprietary vacuum annealing process. The vacuum annealed ion source minimizes outgassing of hydrogen, for superior background measurement performance in demanding UHV applications where total pressure is < 5 x 10-10 mbar.

For radiation-hard environments, the HAL 201 RC incorporates radiation-resistant RF electronics and offers remote RF head mounting options to support reliable operation.

EPICS is the standard instrument control software used in many light sources around the world and the Hiden HAL system is fully compatible with EPICS software drivers.

Typical applications

Residual gas analysisLeak detectionDesorptionOutgassing studiesBakeout cyclesPump performanceProcess gas contaminants

Key Features.

  • Vacuum fired ion sources to minimize source outgassing
  • Electron impact ionizer with twin oxide coated Iridium filament
  • Dual Faraday/channeltron electron multiplier detector
  • Minimum detectable partial pressure of 1 x 10⁻¹⁵ mbar
  • Maximum operating pressure of 1 x 10⁻⁴ mbar
  • Mass range 100 amu (HAL 101 RC), 200 amu (HAL 201 RC), 300amu (HAL 301 RC)

Software.

Every system ships with control software. Which package suits depends on whether you are running quantitative gas analysis, evolved gas work, or building your own acquisition routines.

MASsoft Professional Mass spectrometer control software supplied with all Hiden instruments.

Downloads.

Hiden's published documents for this instrument.

Mass Spectrometers for Residual Gas Analysis – RGA – For Applications in a Vacuum Environment pdf High Performance Mass Spectrometers for Vacuum and Semiconductor Process Monitoring pdf Mass Spectrometers for Residual Gas Analysis – RGA pdf AP-RGA-202206 – Determination of ionizing threshold of trimethylamine ions with a high resolution RGA mass spectrometer pdf AP-RGA-0008 – Chasing Stardust pdf

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    A broad range of quadrupole residual gas analyzers for contamination monitoring, leak detection and analysis of the species within the vacuum chamber.

  • 3F Series Triple-Filter Quadrupole Mass Spectrometers

    The Hiden 3F and 1000 Series are high-precision triple-filter quadrupole mass spectrometers for analytical residual gas and process applications.

  • 3F PIC Triple-Filter Mass Spectrometers

    The 3F PIC Series is designed for fast-event studies that demand high sensitivity and time resolution.

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