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HALO 201 MBE.

A residual gas analyzer for molecular beam epitaxy, built for prolonged use in MBE environments with molybdenum wiring and a contamination resistant ion source shroud.

2x10⁻¹³ mbar
Best detection limit
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Hiden HALO 201 MBE
HALO 201 MBE · Residual gas analysis

Overview.

The HALO 201 MBE is a dedicated residual gas analyzer for molecular beam epitaxy (MBE) vacuum diagnostic applications.

The MBE specific analyzer is constructed from compatible materials and designed for prolonged use in MBE environments. As standard it includes molybdenum wiring in place of copper and a contamination resistant ion source shroud.

It has a dual Faraday/Channelplate electron multiplier detector, with a minimum detectable partial pressure of 1×10⁻¹¹ mbar (Faraday) and 2×10⁻¹³ mbar (Channelplate). A thermal extender option allows RGA operation during bakeout.

Hiden HALO systems are designed for RGA, gas analysis and process monitoring applications including leak detection, trend analysis and vacuum survey.

Typical applications

III-V and II-VI materialsSemiconductorsFuel cellsOxidesNitridesSolar cells

Key Features.

  • Molybdenum wiring in place of copper wiring to improve RGA system lifetime in MBE environments
  • Contamination resistant ion source shroud
  • Dual Faraday/Channelplate electron multiplier
  • Minimum detectable partial pressure of 1x10⁻¹¹ mbar (Faraday) and 2x10⁻¹³ mbar (Channelplate)
  • Thermal extender option for RGA operation during bakeout

Specifications.

Analyzer
MBE specific analyzer constructed from compatible materials for prolonged use in MBE environments
Detection limit
Minimum detectable partial pressure of 1x10⁻¹¹ mbar (Faraday) and 2x10⁻¹³ mbar (Channelplate)
Format
Analyzer and RF head
Control software
MASsoft Professional
Detector
Dual Faraday/Channelplate electron multiplier
Wiring
Molybdenum in place of copper
Ion source shroud
Contamination resistant
Bakeout operation
Thermal extender option for RGA operation during bakeout

Downloads.

Hiden's published documents for this instrument.

Residual gas analysis product catalog pdf

Related instruments.

  • RGA Series

    A broad range of quadrupole residual gas analyzers for contamination monitoring, leak detection and analysis of the species within the vacuum chamber.

  • XBS

    A quadrupole mass spectrometer for monitoring multiple beam sources simultaneously, serving as a deposition rate monitor for molecular beam analysis and deposition control.

  • HAL 101X

    A residual gas analyzer for synchrotron, accelerator and tokamak or torus applications in harsh radiation environments, with no active electronics near the gauge.

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