Home / Plasma and thin film process monitoring / HPR-60 MBMS

HPR-60 MBMS.

A compact skimmer inlet molecular beam mass spectrometer for the analysis of reactive gas phase intermediates.

1000 amu
Maximum mass range
Request a quote
Talk to an engineer
Hiden HPR-60 MBMS
HPR-60 MBMS · Gas analysis

Overview.

Radicals are sampled via a multistage differentially pumped skimmer inlet and transferred to the MS ion source with minimal interaction with other species and without wall collisions. Customizable inlets allow connection to many different reactor systems, including atmospheric plasmas.

The skimmer system, combined with a Hiden triple filter precision mass spectrometer, offers a sampling system with ultra fast response and high accuracy.

The three-stage skimmer cone arrangement allows pressure reduction to UHV for mass and energy analysis.

Typical applications

Plasma characterizationGas reaction kineticsEnvironmental studiesCatalysis characterizationGas separation studiesCatalytic reactorsStudy of transientsPlasma chemistry

Key Features.

  • Positive and negative ion analysis
  • Appearance potential spectra for radical analysis
  • Electron attachment mass spectrometry (EAMS) mode option for electronegative radicals analysis
  • Front stage heating option up to 1000°C
  • Molecular beam chopper option for automated beam foreground-background measurement
  • Enhanced pumping for sampling to 5 bar
  • Options to configure integral MS for standalone studies in vacuum chamber
  • MCS detector option for 50 ns time resolved sampling
  • Liquid N2 cryopanel for parts-per-billion level studies

Specifications.

Analyzer
Triple filter precision mass spectrometer, combined with a skimmer inlet system
Mass range options
300, 510 or 1000 amu
Ionization
Electron attachment ionization mode and APSI-MS soft ionization mode
Standard inlet
Multistage differentially pumped skimmer inlet
Sampling pressure
Enhanced pumping option for sampling to 5 bar
Format
Compact skimmer inlet mass spectrometer
Control software
MASsoft Professional (Windows PC software) with RS232, USB and Ethernet communication links
Energy range options
100 eV or 1000 eV
Atmospheric sampling
Molecular beam sampling at atmospheric pressure
Time resolution option
MCS detector option for 50 ns time resolved sampling

Downloads.

Hiden's published documents for this instrument.

Gas analysis product catalog pdf Thin films, plasma and surface engineering product catalog pdf Atmospheric plasma applications pdf

Related instruments.

  • EQP Series

    A quadrupole mass spectrometer series for direct analysis of plasma ion mass and energy, measuring ions, neutrals and radicals from plasma.

  • HPR-20 EPIC

    A gas analysis system with a triple filter mass spectrometer and a pulse ion counting detector for positive and negative ion detection.

  • HPR-20 TMS

    A transient mass spectrometer configured for fast event analysis of gases and vapors at pressures near atmosphere, ideal for fast gas switching experiments.

See all instruments

Talk to an applications engineer.

Describe the experiment. An applications engineer reads it personally and typically replies within one business day.

Email us

Or call 1-888-96-HIDEN, Monday to Friday, 8:30am to 5pm ET.