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IG5C.

A 5keV Cesium ion gun for UHV surface analysis applications

5 keV
Beam energy
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IG5C cesium ion gun
IG5C · Surface analysis (SIMS)

Overview.

The IG5C features a low power, high brightness, surface ionization source coupled to a compact ion column, providing high performance in a small package. The gun is designed as a primary ion beam for all SIMS applications, dynamic, static and imaging.

Controlled via a windows PC based interface, which handles thermal management of the source, the gun is easy and reproducible to set up and can be configured for high current or small spot applications. Drivers for LabVIEW are also available to permit OEM integration into other systems.

Typical applications

Thin Films Optical CoatingElectronic Materials

Key Features.

  • Air stable ion source
  • Small mounting flange for flexible installation
  • Easy installation of self aligning replacement sources
  • Long source lifetime
  • Differential pumping to maintain true UHV chamber pressure
  • Two lens column design
  • Easy replacement of beam defining aperture

Downloads.

Hiden's published documents for this instrument.

Hiden SIMS – Analytical Secondary Ion Mass Spectrometry Products pdf Mass Spectrometers for Surface Analysis pdf SIMS Applications pdf

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  • IG20

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  • SIMS Workstation

    High performance static and dynamic SIMS for surface composition analysis and depth profiling, with SNMS for quantification in thin film measurements.

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