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MAXIM.

A system for static and dynamic SIMS and SNMS applications

1000 amu
Maximum mass range
30°
Angular acceptance
250°C
Bakeout temperature
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MAXIM SIMS analyzer during sample analysis
MAXIM · Surface analysis (SIMS)

Overview.

The Hiden MAXIM quadruple SIMS analyzer is a state of the art secondary ion mass spectrometer for positive and negative, static, dynamic and neutral analytical applications.

The MAXIM analyzer system includes an integral energy filter for ion acceptance at 30° to the probe axis, high transmission SIMS extraction optics, triple mass filter, pulse ion counting detector and control electronics.

The 30° acceptance angle allows the MAXIM to be mounted with its axis parallel to the plane of the sample, leaving a clear view of the sampled area for other light or ion optics. The MAXIM is tolerant of sample charging making it an ideal probe for the analysis of insulators. Also, large acceptance angle allows for wide area imaging.

Typical applications

Surgical StentFlexible Solar Cell

Key Features.

  • Mass range options: 300amu, 500amu or 1000amu
  • Detector: Ion counting detector, Positive and Negative ion detection, 10⁷ cps
  • Mass filter: Triple filter
  • Pole diameter: 9mm
  • Bakeout: 250°C
  • Ion energy filter: 30° angular acceptance
  • Ionizer: Electron bombardment, single filament for SNMS and RGA

Specifications.

Mass range options
300amu, 500amu or 1000amu
Detector
Ion counting detector, Positive and Negative ion detection, 10⁷ cps
Mass filter
Triple filter
Pole diameter
9mm
Bakeout
250°C
Ion energy filter
30° angular acceptance
Ionizer
Electron bombardment, single filament for SNMS and RGA

Software.

Every system ships with control software. Which package suits depends on whether you are running quantitative gas analysis, evolved gas work, or building your own acquisition routines.

MASsoft Professional Mass spectrometer control software supplied with all Hiden instruments.

Downloads.

Hiden's published documents for this instrument.

Hiden SIMS – Analytical Secondary Ion Mass Spectrometry Products pdf Mass Spectrometers for Surface Analysis pdf SIMS Applications pdf AP0088 – Metal-Carbon Composites and Multilayer Thin Films Prepared by Plasma Assisted Sequential Deposition pdf AP0128 – Magnesium Nitride Phase Formation Through New Ion Beam Implantation Technique pdf

Related instruments.

  • EQS

    A system for the analysis of secondary positive and negative ions from solid samples

  • IG20

    A 5keV Argon or Oxygen ion source for UHV surface analysis applications

  • SIMS Workstation

    High performance static and dynamic SIMS for surface composition analysis and depth profiling, with SNMS for quantification in thin film measurements.

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