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Modular SIMS.

Add high performance SIMS capability to your surface analysis chamber

DN150
Mounting flange (minimum)
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Modular SIMS instrument on a single flange
Modular SIMS · Surface analysis (SIMS)

Overview.

Hiden’s Modular SIMS system adds SIMS analysis to vacuum chambers via a DN-150-CF flange.

The Modular SIMS is a complete SIMS instrument on a single flange (DN150mm and greater) combining an ion gun, EQS spectrometer, electron gun, light and camera module and retractable sample current monitor.

The Modular SIMS is designed for fast and easy characterization of layer structures, surface contamination and impurities with sensitive detection of positive and negative ions being assisted by the gas primary ion beam and provides isotopic sensitivity across the entire periodic table. It is one of our most simple and easy to use SIMS instrument, it has many of the features available on the highest specification instruments, such as nanometer depth resolution. Making it ideal for the research of thin films, corrosion studies and metallic species.

Typical applications

Quadrupole Mass Spectrometers for Thin Films and Surface EngineeringNuclear MaterialsUHV Surface Science

Key Features.

  • Custom systems use standard UHV components
  • Software package mirrors that used with all Hiden SIMS systems
  • 3D characterization
  • Nanometer depth resolution
  • Integration with third party ion guns, electron guns, XPS, other instruments
  • Full 3D CAD design and modeling
  • Experience in both research and production integration

Downloads.

Hiden's published documents for this instrument.

Hi5 – Simultaneous Positive and Negative FIB-SIMS pdf Hi5 Flyer pdf Mass Spectrometers for Surface Analysis pdf Mass Spectrometers for Thin Films, Plasma and Surface Engineering pdf SIMS Applications pdf Suib Group, University of Connecticut – The Effectiveness of Hiden’s Compact SIMS Analysis System for Various Research Applications pdf

Related instruments.

  • EQS

    A system for the analysis of secondary positive and negative ions from solid samples

  • IG20

    A 5keV Argon or Oxygen ion source for UHV surface analysis applications

  • IG5C

    A 5keV Cesium ion gun for UHV surface analysis applications

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