Home / Residual gas analyzers / RGA Series

RGA Series.

A broad range of quadrupole residual gas analyzers for contamination monitoring, leak detection and analysis of the species within the vacuum chamber.

2 x 10⁻¹⁵ mbar
Best detection limit
510 amu
Maximum mass range
Request a quote
Talk to an engineer
Hiden RGA Series
RGA Series · Residual gas analysis

Overview.

Hiden residual gas analyzers are quadrupole mass spectrometers configured in a broad range of products to address applications in vacuum processing, science and technology.

The series includes three specification levels: HALO for residual gas analysis, HAL/3F triple filter mass spectrometers for analytical applications, and HAL/3F PIC with pulse ion counting detection for fast event studies.

All Hiden residual gas analyzers are application tested and calibrated, and are backed by a 3 year warranty and lifetime service support.

Typical applications

Residual gas analysisLeak detectionDesorptionOutgassing studiesBakeout cyclesPump performanceProcess gas contaminants

Key Features.

  • Mass range options of 50, 100, 200, 300 and 510 amu
  • Ultra fast data acquisition, up to 650 measurements per second
  • Twin burnout-resistant oxide coated iridium filaments
  • Real-time background subtract
  • Range of ion source and shroud options
  • Integral mass library
  • Advanced analysis capability for complex gas interpretation
  • High sensitivity helium leak detection, mass selectable for alternative search gases

Specifications.

Analyzer
Single and triple filter quadrupole mass spectrometers
Mass range options
50, 100, 200, 300 and 510 amu
Detection limit
Minimum detectable concentrations of 2 x 10⁻¹³, 2 x 10⁻¹⁴ and 2 x 10⁻¹⁵ mbar, with analog and pulse ion counting detectors
Ionization
Range of electron impact ion sources available for any RGA
Format
Analyzer gauge head with RF head
Control software
MASsoft Professional
Data acquisition rate
Up to 650 measurements per second
Filaments
Twin burnout-resistant oxide coated iridium
Detection limit, HALO
1x10⁻¹¹ mbar with Faraday, 2x10⁻¹³ mbar with electron multiplier
Maximum operating pressure, HALO
1x10⁻⁴ mbar
Detection limit, HAL/3F
1x10⁻¹¹ mbar with Faraday detector, 2x10⁻¹⁴ mbar with single channel electron multiplier
Maximum operating pressure, HAL/3F
2x10⁻⁴ mbar
Detection limit, HAL/3F PIC
Below 5x10⁻¹⁵ mbar with pulse ion counting detector
Maximum operating pressure, HAL/3F PIC
5x10⁻⁶ mbar, or 1x10⁻⁴ mbar with Faraday option

Downloads.

Hiden's published documents for this instrument.

Residual gas analysis product catalog pdf RGA series brochure pdf

Related instruments.

  • HALO 201 MBE

    A residual gas analyzer for molecular beam epitaxy, built for prolonged use in MBE environments with molybdenum wiring and a contamination resistant ion source shroud.

  • HAL 101X

    A residual gas analyzer for synchrotron, accelerator and tokamak or torus applications in harsh radiation environments, with no active electronics near the gauge.

  • XBS

    A quadrupole mass spectrometer for monitoring multiple beam sources simultaneously, serving as a deposition rate monitor for molecular beam analysis and deposition control.

  • DLS-1

    A mass spectrometer for real-time quantitative analysis of complex gas and vapor mixtures in fusion applications, using TIMS recipes for hydrogen and helium isotopes.

See all instruments

Talk to an applications engineer.

Describe the experiment. An applications engineer reads it personally and typically replies within one business day.

Email us

Or call 1-888-96-HIDEN, Monday to Friday, 8:30am to 5pm ET.