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SIMS Workstation.

High performance static and dynamic SIMS for surface composition analysis and depth profiling, with SNMS for quantification in thin film measurements.

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Hiden SIMS Workstation
SIMS Workstation · Surface analysis (SIMS)

Overview.

The SIMS Workstation is a family of instruments based around a large multi-function UHV chamber, designed to be flexible in both function and cost so that features can be added or upgrades made as required.

There are three standard configurations: the Foundation SIMS Workstation, the SIMS Workstation and the SIMS WorkstationPlus. The Foundation has the main chamber and IG20 argon/oxygen source with the 9 mm MAXIM spectrometer, a simple manipulator and an electron gun for charge compensation. Adding a full X-Y manipulator and load lock creates the standard SIMS Workstation.

The SIMS WorkstationPlus is the fully featured instrument, with the IG5C cesium ion gun, liquid nitrogen cold trap and oxygen flood. Other options can be specified on all of the instruments.

Typical applications

CatalysisSurface analysisThin film and surface engineeringNanotechnologyFuel cellsSemiconductors

Key Features.

  • Large multi-function UHV chamber
  • Top port access for an XPS spectrometer, and a front port optimized for a non-monochromated x-ray source
  • SNMS for quantification in thin film composition measurements
  • Three standard configurations: Foundation SIMS Workstation, SIMS Workstation and SIMS WorkstationPlus

Specifications.

Analyzer
MAXIM spectrometer, 9 mm in the Foundation configuration
Ionization
Static and dynamic SIMS, with SNMS for quantification
Format
Large multi-function UHV chamber
Control software
Hiden MASsoft Professional and SIMS Mapper
Primary ion source
IG20 argon/oxygen source in the Foundation configuration; IG5C cesium ion gun in the WorkstationPlus configuration
Manipulator and load lock
Full X-Y manipulator and load lock in the standard configuration; simple manipulator in the Foundation configuration
Charge compensation
Electron gun in the Foundation configuration
SIMS enhancement
Liquid nitrogen cold trap and oxygen flood in the WorkstationPlus configuration

Downloads.

Hiden's published documents for this instrument.

Mass spectrometers for surface analysis catalog pdf SIMS applications catalog pdf Thin films, plasma and surface engineering product catalog pdf

Related instruments.

  • Compact SIMS

    A SIMS tool designed for fast and reliable characterization of layer structures, surface contamination and impurities, with sensitive positive ion detection.

  • AutoSIMS

    A self-contained automated SIMS tool for routine and repetitive surface analysis of thin films, contamination and doping, in conductive and insulating material.

  • ToF-qSIMS Workstation

    A time of flight quadrupole SIMS system offering static ToF-SIMS capabilities and high dynamic range depth profiling from the quadrupole SIMS.

  • Dual Polarity SIMS Workstation

    The Dual Polarity SIMS Workstation simultaneously detects positive and negative ions using two opposing EQS spectrometers. Designed for ultra-thin layer analysis and battery research, it is ideal for studying materials such as the solid electrolyte interphase (SEI) layer.

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