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FIB-SIMS.

FIB-SIMS integrates Hiden’s EQS-FIB 1000 SIMS probe with existing FIB systems, delivering 50 nm lateral and 5 nm depth resolution with standard and custom platform interfaces.

1000 amu
Maximum mass range
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Hiden FIB-SIMS
FIB-SIMS · Nanotechnology

Overview.

FIB-SIMS is our EQS 9mm SIMS probe (EQS-FIB 1000) bolted onto an existing FIB system. Standard adapters are available for Zeiss Crossbeam and Thermo Dualbeam, and custom interfaces can be made for other FIB platforms. Resolution is 50 nm lateral and 5 nm depth.

Typical applications

FIB-SIMSBattery research, detection of lithium using SIMS on a FIB microscopeStatic and dynamic SIMS analysisSputtered ion and neutral mass and energy analysisRoutine materials science sputter depth profilingHigh performance bolt-on SIMS/SNMSSurface analysisThin film and surface engineeringCatalysisSurface science

Key Features.

  • 45 degree energy analyzer with resolution to 0.2 eV
  • Positive and negative secondary ion detection
  • Optional differential pumping
  • SNMS option
  • Integrated residual gas analysis
  • Standard and custom lengths to 750 mm insertion
  • Mass range options of 50, 300, 510 and 1000 amu
  • 6 mm or 9 mm triple quadrupole analyzer
  • Slim fitting for crowded sample regions
  • Can be mounted on a 50 mm or 100 mm z-drive retraction system

Specifications.

Analyzer
EQS: 6 mm or 9 mm triple stage quadrupole mass filter with a 45 degree electrostatic sector
Mass range options
50, 300, 510 and 1000 amu
Detection limit
Sub ppm sensitivity for lithium
Ionization
Positive and negative secondary ion detection
Sampling pressure
Chamber pressures up to 1x10⁻⁵ mbar with the optional differential pumping
Format
Bolt-on SIMS probe
Control software
Hiden MASsoft Professional and SIMS Mapper
Energy analyzer
45 degree energy analyzer with resolution to 0.2 eV
Dynamic range
Over 6 orders of magnitude
Insertion length
Standard and custom lengths to 750 mm
Mounting
50 mm or 100 mm z-drive retraction system
SNMS
Option

Downloads.

Hiden's published documents for this instrument.

Mass spectrometers for surface analysis catalog pdf SIMS applications catalog pdf

Related instruments.

  • SIMS Workstation

    High performance static and dynamic SIMS for surface composition analysis and depth profiling, with SNMS for quantification in thin film measurements.

  • Dual Polarity SIMS Workstation

    The Dual Polarity SIMS Workstation simultaneously detects positive and negative ions using two opposing EQS spectrometers. Designed for ultra-thin layer analysis and battery research, it is ideal for studying materials such as the solid electrolyte interphase (SEI) layer.

  • ToF-qSIMS Workstation

    A time of flight quadrupole SIMS system offering static ToF-SIMS capabilities and high dynamic range depth profiling from the quadrupole SIMS.

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